Invention Application
- Patent Title: MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS AND METHOD OF CORRECTING OPTICAL WAVEFRONT DEFORMATIONS IN SUCH AN APPARATUS
- Patent Title (中): 微波投影曝光装置及其在这种装置中校正光波形变形的方法
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Application No.: PCT/EP2013/002693Application Date: 2013-09-09
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Publication No.: WO2015032418A1Publication Date: 2015-03-12
- Inventor: GRUNER, Toralf , WEISS, Robert , HOLZMANN, Jörg
- Applicant: CARL ZEISS SMT GMBH
- Applicant Address: Rudolf-Eber-Str. 2 73447 Oberkochen DE
- Assignee: CARL ZEISS SMT GMBH
- Current Assignee: CARL ZEISS SMT GMBH
- Current Assignee Address: Rudolf-Eber-Str. 2 73447 Oberkochen DE
- Agency: SCHWANHÄUSSER, Gernot et al.
- Main IPC: G03F7/20
- IPC: G03F7/20
Abstract:
A microlithographic projection exposure apparatus (10) comprises a correction device (40) that is configured to correct optical wavefront deformations and comprises a first optical element (42a), a second optical element (42b) and a drive mechanism (44) that is configured to move the first and second optical elements between a first arrangement and a second arrangement. In the first arrangement the first optical element (42a) is an inner optical element having at least a portion that is arranged in a projection light path (PLP), and the second optical element (42b) is an outer optical element that is arranged completely outside the projection light path. In the second arrangement the second optical element is the inner optical element and the first optical element is the outer optical element. The correction device further comprises a temperature control device (50a, 50b) that is configured to modify a temperature distribution in the outer optical element.
Information query
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