Invention Application
WO2015049624A1 AMINE PRECURSORS FOR DEPOSITING GRAPHENE 审中-公开
用于沉积石墨的胺前体

AMINE PRECURSORS FOR DEPOSITING GRAPHENE
Abstract:
The present invention relates to the use of an amine precursor of formula I (X 1 -R 1 ) n -NH (3-n) (I) or its ammonium salts for depositing a graphene film having a nitrogen content of from 0 to 65% by weight on a substrate S1 by chemical vapor deposition (CVD), wherein R 1 is selected from (a) C 1 to C 10 alkanediyl, which may all optionally be interrupted by at least one of O, NH and NR 2 , (b) alkenediyl, which may all optionally be interrupted by at least one of O, NH and NR 2 , (c) alkynediyl, which may all optionally be interrupted by at least one of O, NH and NR 2 , (d) C 6 to C 20 aromatic divalent moiety, and (e) CO and CH 2 CO, X 1 is selected from H, OH, OR 2 , NH 2 , NHR 2 , or NR 2 2 , wherein two groups X 1 may together form a bivalent group X 2 being selected from a chemical bond, O, NH, or NR 2 , R 2 is selected from C 1 to C 10 alkyl and a C 6 to C 20 aromatic moiety which may optionally be substituted by one or more substituents X 1 , n is 1, 2, or 3.
Patent Agency Ranking
0/0