Invention Application
WO2015142926A1 SWITCHABLE LASER AND FIBER BASED LAMPHOUSE FOR OPTIMAL POWER OUTPUT IN DIFFERENT WAVELENGTH BANDS AND PIXEL SIZES 审中-公开
可切换激光和基于光纤的灯泡,用于在不同波长范围和像素尺寸下实现最佳功率输出

  • Patent Title: SWITCHABLE LASER AND FIBER BASED LAMPHOUSE FOR OPTIMAL POWER OUTPUT IN DIFFERENT WAVELENGTH BANDS AND PIXEL SIZES
  • Patent Title (中): 可切换激光和基于光纤的灯泡,用于在不同波长范围和像素尺寸下实现最佳功率输出
  • Application No.: PCT/US2015/021070
    Application Date: 2015-03-17
  • Publication No.: WO2015142926A1
    Publication Date: 2015-09-24
  • Inventor: CHIMMALGI, AnantYADAV, RahulWITTENBERG, Joshua
  • Applicant: KLA-TENCOR CORPORATION
  • Applicant Address: Legal Department One Technology Drive Milpitas, California 95035 US
  • Assignee: KLA-TENCOR CORPORATION
  • Current Assignee: KLA-TENCOR CORPORATION
  • Current Assignee Address: Legal Department One Technology Drive Milpitas, California 95035 US
  • Agency: MCANDREWS, Kevin et al.
  • Priority: US61/954,996 20140318; US14/301,781 20140611
  • Main IPC: H05G2/00
  • IPC: H05G2/00
SWITCHABLE LASER AND FIBER BASED LAMPHOUSE FOR OPTIMAL POWER OUTPUT IN DIFFERENT WAVELENGTH BANDS AND PIXEL SIZES
Abstract:
Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.
Patent Agency Ranking
0/0