公开(公告)号：WO2015143150A1

公开(公告)日：2015-09-24

申请号：PCT/US2015/021460

申请日：2015-03-19

Applicant: KLA-TENCOR CORPORATION

Inventor： OH, Sebaek ,  CHIMMALGI, Anant ,  YADAV, Rahul ,  DERSTINE, Matthew ,  BEZEL, Ilya

IPC: H01J37/32

CPC classification number: H01J65/00 ,  H01J61/025 ,  H01J61/32 ,  H01J65/04

Abstract: A laser-sustained plasma light source includes a plasma cell configured to contain a volume of gas. The plasma cell is configured to receive illumination from a pump laser in order to generate plasma within the volume of gas. The plasma emits broadband radiation. The plasma cell includes one or more transparent portions being at least partially transparent to at least a portion of illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The plasma cell also includes one or more nanostructured layers disposed on one or more surfaces of the one or more transparent portions of the plasma cell. The one or more nanostructure layers form a region of refractive index control across an interface between the one or more transparent portions of the plasma cell and an atmosphere.

Abstract translation: 激光维持等离子体光源包括被配置为容纳一定体积的气体的等离子体单元。 等离子体单元被配置为从泵浦激光器接收照明，以在气体体积内产生等离子体。 等离子体发射宽带辐射。 等离子体单元包括对来自泵浦激光器的至少一部分照明和由等离子体发射的宽带辐射的至少一部分至少部分透明的一个或多个透明部分。 等离子体单元还包括设置在等离子体单元的一个或多个透明部分的一个或多个表面上的一个或多个纳米结构层。 一个或多个纳米结构层在等离子体电池的一个或多个透明部分和气氛之间的界面上形成折射率控制的区域。

公开(公告)号：WO2017058790A1

公开(公告)日：2017-04-06

申请号：PCT/US2016/053952

申请日：2016-09-27

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  OH, Sebaek ,  WITTENBURG, Joshua ,  WILSON, Lauren ,  YADAV, Rahul ,  BEZEL, Ilya ,  NAVONE, Mike ,  SHCHEMELININ, Anatoly

IPC: H05G2/00 ,  G03F7/20

CPC classification number: H05G2/008 ,  G01N23/04 ,  G02B6/0005 ,  G02B6/0006 ,  G02B6/0008 ,  G02B6/02042 ,  G02B6/028 ,  G02B6/4215 ,  G02B27/141

Abstract: An illumination pump source is disclosed. The illumination pump source includes a set of power sources configured to generate a set of laser beams, with at least some of the set of laser beams configured to include illumination having different wavelengths. The illumination pump source also includes an optical fiber. The illumination pump source also includes one or more optical elements, the one or more optical elements configured to couple the illumination from at least some of the laser beams to one or more regions of the optical fiber.

Abstract translation: 公开了一种照明泵浦源。 照明泵浦源包括被配置为产生一组激光束的一组电源，其中该组激光束中的至少一些被配置为包括具有不同波长的照明。 照明泵浦源还包括光纤。 照明泵浦源还包括一个或多个光学元件，所述一个或多个光学元件被配置为将来自至少一些激光束的照明耦合到光纤的一个或多个区域。

公开(公告)号：WO2015142926A1

公开(公告)日：2015-09-24

申请号：PCT/US2015/021070

申请日：2015-03-17

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  YADAV, Rahul ,  WITTENBERG, Joshua

IPC: H05G2/00

CPC classification number: G02B6/0006 ,  G02B6/0008 ,  G02B6/3512 ,  H01J65/04

Abstract: Systems and methods for providing laser sustained plasma light sources are disclosed. Different from conventional laser sustained plasma light sources where one fiber size and one wavelength combination is used in the lamphouse to generate light for different bands and pixel sizes, switchable fiber sizes and wavelength combinations are provided for optimal power output in different wavelength bands and pixel sizes. More specifically, switchable fiber configurations are provided where larger fibers with higher pump powers are used for bigger pixel sizes and higher wavelength bands while smaller fibers are used for smaller pixel size and shorter wavelength bands. Additionally and/or alternatively, pumping schemes are provided where pump wavelengths close to the absorption peak of the gas fill are used for bigger pixel sizes while pump wavelengths away from the gas fill absorption peak are used for smaller pixel sizes.

Abstract translation: 公开了用于提供激光持续等离子体光源的系统和方法。 与传统的激光持续等离子体光源不同，其中在灯塔中使用一个光纤尺寸和一个波长组合来产生用于不同带和像素尺寸的光，可提供可切换的光纤尺寸和波长组合用于在不同波长带和像素尺寸中实现最佳功率输出 。 更具体地说，可提供可切换的光纤配置，其中具有更高的泵浦功率的较大的光纤用于较大的像素尺寸和较高的波长带，而较小的光纤用于较小的像素尺寸和较短的波长带。 附加地和/或替代地，提供泵送方案，其中靠近气体填充物的吸收峰的泵浦波长用于较大的像素尺寸，而远离气体填充吸收峰的泵波长用于较小的像素尺寸。

公开(公告)号：WO2015148671A1

公开(公告)日：2015-10-01

申请号：PCT/US2015/022498

申请日：2015-03-25

Applicant: KLA-TENCOR CORPORATION

Inventor： CHIMMALGI, Anant ,  YADAV, Rahul ,  SHCHEMELININ, Anatoly ,  BEZEL, Ilya ,  DERSTINE, Matthew

IPC: H01S3/063 ,  G02B6/26

CPC classification number: H01S3/0915 ,  G02B6/2804 ,  G02B6/4296 ,  H01S3/0071 ,  H01S3/2383 ,  H05G2/008

Abstract: A system for generating high power broadband light includes multiple light-sustained plasma light sources. Each one of the light-sustained sources includes a pumping source, a gas containment structure for containing gas and configured to receive pumping illumination from the pumping source and a parabolic reflector element arranged to collect at least a portion of the broadband radiation emitted by the generated plasma and form a collimated broadband radiation output. The system also including a set of optical elements configured to combine the collimated broadband outputs from the parabolic reflector elements of the multiple light-sustained plasma light sources into an aggregated broadband beam.

Abstract translation: 用于产生高功率宽带光的系统包括多个光持续等离子体光源。 光源中的每一个包括泵送源，用于容纳气体并被配置为从泵浦源接收泵浦照明的气体容纳结构和抛物面反射器元件，抛物面反射器元件被布置成收集所产生的宽度辐射的至少一部分 等离子体并形成准直宽带辐射输出。 该系统还包括一组光学元件，其被配置为将来自多个光持久等离子体光源的抛物面反射器元件的准直宽带输出组合成聚集的宽带光束。

公开(公告)号：WO2017205198A1

公开(公告)日：2017-11-30

申请号：PCT/US2017/033485

申请日：2017-05-19

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  GROSS, Kenneth P. ,  WILSON, Lauren ,  YADAV, Rahul ,  WITTENBERG, Joshua ,  BHUIYAN, Aizaz ,  SHCHEMELININ, Anatoly ,  CHIMMALGI, Anant ,  SOLARZ, Richard

IPC: H05G2/00 ,  H01J65/04

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element configured to focus the pump illumination from the pumping source into the volume of the gas mixture in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas containment element may be configured to contain a volume of a gas mixture including a first gas component and a second gas component. The second gas component suppresses at least one of a portion of the broadband radiation associated with the first gas component or radiation by one or more excimers associated with the first gas component from a spectrum of radiation exiting the gas mixture.

Abstract translation: 用于形成激光维持等离子体的系统包括气体容纳元件，配置成产生泵照明的照明源和配置成将来自泵浦源的泵照明聚焦成体积为 气体混合物以便在发射宽带辐射的气体混合物的体积内产生等离子体。 气体容纳元件可构造成容纳一定体积的包括第一气体组分和第二气体组分的气体混合物。 第二气体组分通过与第一气体组分相关联的一个或多个准分子激光器抑制与第一气体组分或辐射相关联的一部分宽带辐射中的至少一个来自离开气体混合物的辐射光谱。

公开(公告)号：WO2016112326A1

公开(公告)日：2016-07-14

申请号：PCT/US2016/012707

申请日：2016-01-08

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  GROSS, Kenneth P. ,  SOLARZ, Richard ,  WILSON, Lauren ,  YADAV, Rahul ,  WITTENBERG, Joshua ,  CHIMMALGI, Anant ,  LIU, Xiumei ,  BRUGUIER, Brooke

IPC: H01J65/04

CPC classification number: H05G2/008 ,  H01J61/16 ,  H01J65/00 ,  H01J65/04 ,  H05G2/003

Abstract: A system for forming a laser-sustained plasma includes a gas containment element, an illumination source configured to generate pump illumination, and a collector element. The gas containment element is configured to contain a volume of a gas mixture. The collector element is configured to focus the pump illumination from the pumping source into the volume of the gas mixture contained within the gas containment element in order to generate a plasma within the volume of the gas mixture that emits broadband radiation. The gas mixture filters one or more selected wavelengths of radiation emitted by the plasma.

Abstract translation: 用于形成激光维持等离子体的系统包括气体容纳元件，被配置为产生泵浦照明的照明源和收集器元件。 气体容纳元件构造成容纳一定体积的气体混合物。 收集器元件被配置为将来自泵送源的泵浦照明聚焦到容纳在气体容纳元件内的气体混合物的体积中，以便在发射宽带辐射的气体混合物的体积内产生等离子体。 气体混合物过滤由等离子体发射的一个或多个选定波长的辐射。