Invention Application
WO2016081760A1 AUTOMATED OPTICAL INSPECTION OF UNIT SPECIFIC PATTERNING 审中-公开
自动光学检测单元特定格式

AUTOMATED OPTICAL INSPECTION OF UNIT SPECIFIC PATTERNING
Abstract:
A method of automated optical inspection (AOI) for a plurality of unique semiconductor packages can comprise providing a plurality of semiconductor die formed as a reconstituted wafer. A plurality of unit specific patterns can be formed by forming a unit specific pattern over each of the plurality of semiconductor die, wherein each of the unit specific patterns is customized to fit its respective semiconductor die. A plurality of images can be acquired by acquiring an image for each of the plurality of unit specific patterns. A plurality of unique reference standards can be created by creating a unique reference standard for each of the plurality of unit specific patterns. Defects can be detected in the plurality of unit specific patterns by comparing one of the plurality of unique reference standards to a corresponding one of the plurality of images for each of the plurality of unit specific patterns.
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