Invention Application
- Patent Title: AUTOMATED OPTICAL INSPECTION OF UNIT SPECIFIC PATTERNING
- Patent Title (中): 自动光学检测单元特定格式
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Application No.: PCT/US2015/061663Application Date: 2015-11-19
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Publication No.: WO2016081760A1Publication Date: 2016-05-26
- Inventor: BISHOP, Craig , BORA, Vaibhav, Joga Singh , SCANLAN, Christopher, M. , OLSON, Thimothy L.
- Applicant: DECA TECHNOLOGIES INC.
- Applicant Address: 7855 South River Parkway, Ste. 111 Tempe, AZ 85284 US
- Assignee: DECA TECHNOLOGIES INC.
- Current Assignee: DECA TECHNOLOGIES INC.
- Current Assignee Address: 7855 South River Parkway, Ste. 111 Tempe, AZ 85284 US
- Agency: BOOTH, Kenneth, C.
- Priority: US62/081,676 20141119; US14/946,464 20151119
- Main IPC: H01L21/66
- IPC: H01L21/66 ; G06K9/64
Abstract:
A method of automated optical inspection (AOI) for a plurality of unique semiconductor packages can comprise providing a plurality of semiconductor die formed as a reconstituted wafer. A plurality of unit specific patterns can be formed by forming a unit specific pattern over each of the plurality of semiconductor die, wherein each of the unit specific patterns is customized to fit its respective semiconductor die. A plurality of images can be acquired by acquiring an image for each of the plurality of unit specific patterns. A plurality of unique reference standards can be created by creating a unique reference standard for each of the plurality of unit specific patterns. Defects can be detected in the plurality of unit specific patterns by comparing one of the plurality of unique reference standards to a corresponding one of the plurality of images for each of the plurality of unit specific patterns.
Information query
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