Invention Application
WO2016187139A1 SYSTEM AND METHOD FOR IMAGING A SAMPLE WITH AN ILLUMINATION SOURCE MODIFIED BY A SPATIAL SELECTIVE WAVELENGTH FILTER
审中-公开
用空间选择性波长滤波器修改的照明源成像样品的系统和方法
- Patent Title: SYSTEM AND METHOD FOR IMAGING A SAMPLE WITH AN ILLUMINATION SOURCE MODIFIED BY A SPATIAL SELECTIVE WAVELENGTH FILTER
- Patent Title (中): 用空间选择性波长滤波器修改的照明源成像样品的系统和方法
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Application No.: PCT/US2016/032743Application Date: 2016-05-16
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Publication No.: WO2016187139A1Publication Date: 2016-11-24
- Inventor: ZHAO, Wei , GROSS, Kenneth P , BEZEL, Ilya , PANZER, Matthew
- Applicant: KLA-TENCOR CORPORATION
- Applicant Address: Legal Department One Technology Drive Milpitas, California 95035 US
- Assignee: KLA-TENCOR CORPORATION
- Current Assignee: KLA-TENCOR CORPORATION
- Current Assignee Address: Legal Department One Technology Drive Milpitas, California 95035 US
- Agency: MCANDREWS, Kevin et al.
- Priority: US62/164,085 20150520; US14/839,338 20150828
- Main IPC: G01N21/95
- IPC: G01N21/95 ; G01N21/88
Abstract:
A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.
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