公开(公告)号：WO2016187139A1

公开(公告)日：2016-11-24

申请号：PCT/US2016/032743

申请日：2016-05-16

Applicant: KLA-TENCOR CORPORATION

Inventor： ZHAO, Wei ,  GROSS, Kenneth P ,  BEZEL, Ilya ,  PANZER, Matthew

IPC: G01N21/95 ,  G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N2021/8845 ,  G03F7/7065

Abstract: A system for illuminating a sample with a spectrally filtered illumination source includes an illumination source configured to generate a beam of illumination having a first set of wavelengths. In addition, the system includes a wavelength filtering sub-system, a sample stage, an illumination sub-system, a detector, and an objective to focus illumination from the surface of one or more samples and focus the collected illumination to the detector. Further, the wavelength filtering sub-system includes one or more first dispersive elements positioned to introduce spatial dispersion into the beam, a spatial filter element, and one or more dispersive elements positioned to remove spatial dispersion from the beam. The spatial filter element is further positioned to pass at least a portion of the beam including a second set of wavelengths, wherein the second set of wavelengths is a subset of the first set of wavelengths.

Abstract translation: 用频谱滤波的照明源照射样本的系统包括被配置为产生具有第一组波长的照明束的照明源。 此外，该系统包括波长滤波子系统，样本台，照明子系统，检测器和用于聚焦来自一个或多个样本的表面的照明的物镜，并将收集的照明聚焦到检测器。 此外，波长滤波子系统包括定位成将空间色散引入光束中的一个或多个第一色散元件，空间滤光元件以及定位成从光束去除空间色散的一个或多个色散元件。 空间滤波器元件还被定位成使包括第二组波长的波束的至少一部分通过，其中第二组波长是第一组波长的子集。

公开(公告)号：WO2017100130A1

公开(公告)日：2017-06-15

申请号：PCT/US2016/064980

申请日：2016-12-05

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  GROSS, Kenneth P. ,  PANZER, Matthew ,  CHIMMALGI, Anant ,  WILSON, Lauren ,  WITTENBERG, Joshua

IPC: H01J61/30

CPC classification number: H01J61/025 ,  H01J61/302 ,  H01J61/52 ,  H01J65/04

Abstract: A laser-sustained plasma lamp includes a gas containment structure configured to contain a volume of gas. The gas containment structure is configured to receive pump illumination from a pump laser for generating a plasma within the volume of gas. The gas containment structure includes one or more transmissive structures being at least partially transparent to the pump illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transmissive structures have a graded absorption profile so as to control heating of the one or more transmissive structures caused by the broadband radiation emitted by the plasma.

Abstract translation: 激光维持的等离子灯包括配置成容纳一定体积的气体的气体容纳结构。 气体容纳结构被配置为接收来自泵浦激光器的泵照射以在气体体积内产生等离子体。 气体容纳结构包括一个或多个透射结构，其对泵浦激光器的泵浦照明和由等离子体发射的至少一部分宽带辐射至少部分透明。 一个或多个透射结构具有渐变的吸收分布，以便控制由等离子体发射的宽带辐射引起的一个或多个透射结构的加热。

公开(公告)号：WO2013109701A1

公开(公告)日：2013-07-25

申请号：PCT/US2013/021857

申请日：2013-01-17

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  SHIFRIN, Eugene ,  PANZER, Matthew ,  DERSTINE, Matthew ,  WANG, Jincheng ,  CHIMMALGI, Anant ,  PATIL, Rajeev ,  BRUNNER, Rudolf

IPC: H01J65/04

CPC classification number: F21V9/06 ,  H01J61/125 ,  H01J61/14 ,  H01J61/16 ,  H01J61/20 ,  H01J61/34 ,  H01J61/35 ,  H01J61/40 ,  H01J61/523 ,  H01J65/04

Abstract: A plasma cell for use in a laser-sustained plasma light source includes a plasma bulb configured to contain a gas suitable for generating a plasma, the plasma bulb being substantially transparent to light emanating from a pump laser configured to sustain the plasma within the plasma bulb, wherein the plasma bulb is substantially transparent to at least a portion of a collectable spectral region of illumination emitted by the plasma, and a filter layer disposed on an interior surface of the plasma bulb, the filter layer configured to block a selected spectral region of the illumination emitted by the plasma.

Abstract translation: 用于激光维持等离子体光源的等离子体单元包括配置成容纳适于产生等离子体的气体的等离子体灯泡，该等离子体灯泡对于配置成维持等离子体灯泡内的等离子体的泵浦激光器发出的光基本上是透明的 ，其中所述等离子体灯泡对于由所述等离子体发射的照明的可收集光谱区域的至少一部分基本上是透明的，以及设置在所述等离子体灯泡的内表面上的滤光层，所述滤光层被配置为阻挡所述等离子体灯泡的选定光谱区域 等离子体发射的照明。

公开(公告)号：WO2016145221A1

公开(公告)日：2016-09-15

申请号：PCT/US2016/021816

申请日：2016-03-10

Applicant: KLA-TENCOR CORPORATION

Inventor： BEZEL, Ilya ,  SHCHEMELININ, Anatoly ,  SHIFRIN, Eugene ,  PANZER, Matthew

IPC: H01J37/32

CPC classification number: H01J65/04 ,  H05G2/008

Abstract: An optical system for generating broadband light via light-sustained plasma formation includes a chamber, an illumination source, a set of focusing optics, and a set of collection optics. The chamber is configured to contain a buffer material in a first phase and a plasma-forming material in a second phase. The illumination source generates continuous-wave pump illumination. The set of focusing optics focuses the continuous-wave pump illumination through the buffer material to an interface between the buffer material and the plasma-forming material in order to generate a plasma by excitation of at least the plasma-forming material. The set of collection optics receives broadband radiation emanated from the plasma.

Abstract translation: 用于通过光持续等离子体形成产生宽带光的光学系统包括腔室，照明源，一组聚焦光学器件和一组收集光学器件。 室被配置为在第一相中包含缓冲材料和第二相中的等离子体形成材料。 照明源产生连续波泵照明。 该组聚焦光学器件将连续波泵浦照明通过缓冲材料聚焦到缓冲材料和等离子体形成材料之间的界面上，以便通过激发至少等离子体形成材料产生等离子体。 该组收集光学器件接收从等离子体发出的宽带辐射。

公开(公告)号：WO2015168407A1

公开(公告)日：2015-11-05

申请号：PCT/US2015/028517

申请日：2015-04-30

Applicant: KLA-TENCOR CORPORATION

Inventor： WILSON, Lauren ,  CHIMMALGI, Anant ,  PANZER, Matthew ,  BEZEL, Ilya

IPC: H01J61/02

CPC classification number: H01J61/302 ,  H01J61/025 ,  H01J65/04 ,  H05G2/008

Abstract: A laser-sustained plasma light source includes a plasma lamp configured to contain a volume of gas and receive illumination from a pump laser in order to generate a plasma. The plasma lamp includes one or more transparent portions transparent to illumination from the pump laser and at least a portion of the broadband radiation emitted by the plasma. The one or more transparent portions are formed from a transparent material having elevated hydroxide content above 700 ppm.

Abstract translation: 激光维持等离子体光源包括等离子体灯，其构造成容纳一定体积的气体并且从泵浦激光器接收照明以产生等离子体。 等离子体灯包括对来自泵浦激光器的照明透明的一个或多个透明部分和由等离子体发射的宽带辐射的至少一部分。 一个或多个透明部分由具有高于700ppm的高氢氧化物含量的透明材料形成。

公开(公告)号：WO2015023886A1

公开(公告)日：2015-02-19

申请号：PCT/US2014/051138

申请日：2014-08-14

Applicant: KLA-TENCOR CORPORATION

Inventor： SHCHEMELININ, Anatoly ,  BEZEL, Ilya ,  PANZER, Matthew ,  SHIFRIN, Eugene

IPC: H01J65/04

CPC classification number: G02B27/1006

Abstract: A system for separating plasma pumping light and collected broadband light includes a pump source configured to generate pumping illumination including at least a first wavelength, a gas containment element for containing a volume of gas, a collector configured to focus the pumping illumination from the pumping source into the volume of gas to generate a plasma within the volume of gas, wherein the plasma emits broadband radiation including at least a second wavelength and an illumination separation prism element positioned between a reflective surface of the collector and the pump source and arranged to spatially separate the pumping illumination including the first wavelength and the emitted broadband radiation including at least a second wavelength emitted from the plasma.

Abstract translation: 用于分离等离子体泵浦光和收集的宽带光的系统包括被配置为产生包括至少第一波长的泵浦照明的泵浦源，用于容纳一定体积气体的气体容纳元件，被配置为将来自泵浦源的泵浦照明 进入气体体积以在气体体积内产生等离子体，其中等离子体发射包括至少第二波长的宽带辐射和位于收集器的反射表面和泵浦源之间的照明分离棱镜元件，并布置成在空间上分离 所述泵浦照明包括第一波长和发射的宽带辐射，其包括从等离子体发射的至少第二波长。