Invention Application
- Patent Title: SEAL RING FOR AL-Ge BONDING
- Patent Title (中): 密封圈用于AL-Ge粘接
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Application No.: PCT/SG2017/050038Application Date: 2017-01-26
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Publication No.: WO2017138885A1Publication Date: 2017-08-17
- Inventor: CHIDAMBARAM, Vivek , SIOW, Li Yan , ZHANG, Qing Xin , WICKRAMANAYAKA, Sunil
- Applicant: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
- Applicant Address: 1 Fusionopolis Way, #20-10 Connexis, Singapore 138632 SG
- Assignee: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
- Current Assignee: AGENCY FOR SCIENCE, TECHNOLOGY AND RESEARCH
- Current Assignee Address: 1 Fusionopolis Way, #20-10 Connexis, Singapore 138632 SG
- Agency: SPRUSON & FERGUSON (ASIA) PTE LTD
- Priority: SG10201601013Y 20160211
- Main IPC: H01L21/50
- IPC: H01L21/50 ; H01L23/48 ; B81C3/00
Abstract:
There is provided a method of bonding a first substrate and a second substrate, the method comprising: providing an aluminium (Al) connection having a first width on one side of a first substrate; providing a germanium (Ge) connection having a second width on one side of a second substrate, wherein the second width is larger than the first width; and bonding the Al connection on the first substrate and the Ge connection on the second substrate by eutectic bonding of at least a portion of the Al connection and at least a portion of the Ge connection to form an Al-Ge eutectic melt, wherein the Al-Ge eutectic melt is confined within the second width of the Ge connection.
Information query
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