Invention Application
- Patent Title: METHOD OF MANUFACTURING AN OSCILLATOR, METHOD OF MANUFACTURING AN OSCILLATORY WAVE DRIVING APPARATUS, AND METHOD OF MANUFACTURING AN OPTICAL APPARATUS
- Patent Title (中): 制造振荡器的方法，制造振荡波驱动装置的方法以及制造光学设备的方法
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Application No.: PCT/JP2017/012214Application Date: 2017-03-21
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Publication No.: WO2017164413A1Publication Date: 2017-09-28
- Inventor: HAYASHI, Jumpei , TAKEDA, Kenichi , KOYAMA, Shinya , WATANABE, Takayuki , SHIMIZU, Yasushi , FURUTA, Tatsuo , UEDA, Miki , UEBAYASHI, Akira , TANAKA, Hidenori , KUBOTA, Makoto
- Applicant: CANON KABUSHIKI KAISHA
- Applicant Address: 30-2, Shimomaruko 3-Chome, Ohta-ku, Tokyo 1468501 JP
- Assignee: CANON KABUSHIKI KAISHA
- Current Assignee: CANON KABUSHIKI KAISHA
- Current Assignee Address: 30-2, Shimomaruko 3-Chome, Ohta-ku, Tokyo 1468501 JP
- Agency: OKABE, Yuzuru et al.
- Priority: JP2016-061295 20160325
- Main IPC: H01L41/187
- IPC: H01L41/187 ; H01L41/257 ; H02N2/00
Abstract:
Provided is a method of manufacturing an oscillator, including: arranging an electrode on a piezoelectric ceramics free from being subjected to polarization treatment, to thereby provide a piezoelectric element; bonding the piezoelectric element and a diaphragm to each other at a temperature T1; bonding the piezoelectric element and a power supply member to each other at a temperature T2; and subjecting the piezoelectric ceramics to polarization treatment at a temperature T3, in which the temperature T1, the temperature T2, and the temperature T3 satisfy a relationship T1>T3 and a relationship T2>T3.
Information query
IPC分类:
