Invention Application
WO2018053441A1 SEMICONDUCTOR DEVICE AND METHOD OF UNIT SPECIFIC PROGRESSIVE ALIGNMENT
审中-公开
半导体器件和单元特定逐步对准方法
- Patent Title: SEMICONDUCTOR DEVICE AND METHOD OF UNIT SPECIFIC PROGRESSIVE ALIGNMENT
- Patent Title (中): 半导体器件和单元特定逐步对准方法
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Application No.: PCT/US2017/052095Application Date: 2017-09-18
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Publication No.: WO2018053441A1Publication Date: 2018-03-22
- Inventor: BISHOP, Craig , SCANLAN, Christopher, M.
- Applicant: DECA TECHNOLOGIES INC.
- Applicant Address: 7855 South River Parkway, Ste. 111 Tempe, AZ 85284 US
- Assignee: DECA TECHNOLOGIES INC.
- Current Assignee: DECA TECHNOLOGIES INC.
- Current Assignee Address: 7855 South River Parkway, Ste. 111 Tempe, AZ 85284 US
- Agency: BURNHAM, Bryce W.
- Priority: US62/396,483 20160919; US15/706,647 20170915
- Main IPC: H01L21/66
- IPC: H01L21/66
Abstract:
A semiconductor device and method can comprise measuring a true position of each of a plurality of semiconductor die within an embedded die panel and determining a total radial shift of each of the plurality of semiconductor die. The total radial shift of each of the plurality of semiconductor die can be distributed to two or more layers for each of the plurality of semiconductor die by assigning a portion of the total radial shift to each of the layers according to a priority list to form a distributed radial shift for each of the layers. A transformation for each of the layers for each of the plurality of semiconductor die can be transformed using the distributed radial shift for each of the layers. A unit specific pattern can be formed over each of the plurality of semiconductor die with the transformation for each of the layers.
Information query
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