Invention Application
- Patent Title: MAGNETIC TUNNELING JUNCTION DEVICES WITH SIDEWALL GETTER
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Application No.: PCT/US2017/040136Application Date: 2017-06-29
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Publication No.: WO2019005082A1Publication Date: 2019-01-03
- Inventor: KUO, Charles C. , ATANASOV, Sarah , DOCZY, Mark L. , OGUZ, Kaan , SURI, Satyarth
- Applicant: INTEL CORPORATION
- Applicant Address: 2200 Mission College Blvd. Santa Clara, CA 95054 US
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: 2200 Mission College Blvd. Santa Clara, CA 95054 US
- Agency: HOWARD, James M.
- Main IPC: H01L43/10
- IPC: H01L43/10 ; H01L43/02 ; H01L43/08 ; H01L43/12
Abstract:
MTJ material stacks including one or more material layers that have outdiffused one or more dopants through a layer sidewall edge, MTJ devices employing such stacks, and computing platforms employing such MTJ devices. A free magnet layer or fixed magnet layer may include a dopant, such as boron. A liner layer may be deposited over an MTJ stack, for example in close proximity to the edge of at least one of the fixed or free magnet layers. During a thermal anneal, a dopant, such as boron, may be gettered by the liner. Dopant gettering by the liner may facilitate changes with in the MTJ stack, such as development of perpendicular magnetic anisotropy within a magnet layer. Following dopant gettering, the liner may be retained, or at least partially removed as sacrificial.
Information query
IPC分类: