Invention Application
- Patent Title: COMPOSITIONS AND METHODS FOR PREVENTING COLLAPSE OF HIGH ASPECT RATIO STRUCTURES DURING DRYING
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Application No.: PCT/US2018/053299Application Date: 2018-09-28
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Publication No.: WO2019067833A3Publication Date: 2019-04-04
- Inventor: GE, Jhih, Kuei , LEE, Yi-Chia , LIU, Wen, Dar , CHEN, Tianniu
- Applicant: VERSUM MATERIALS US, LLC
- Applicant Address: 8555 S. River Parkway Tempe, AZ 85284 US
- Assignee: VERSUM MATERIALS US, LLC
- Current Assignee: VERSUM MATERIALS US, LLC
- Current Assignee Address: 8555 S. River Parkway Tempe, AZ 85284 US
- Agency: AQUILINA, James, J.
- Priority: US62/565,266 20170929; US16/141,735 20180925
- Main IPC: C11D7/50
- IPC: C11D7/50 ; C11D11/00 ; C11D7/32
Abstract:
Described herein is an aqueous composition for treating a substrate including patterns having line-space dimensions of 50 nm or below to prevent collapse of the patters, the composition comprising: a solvent system comprising water and a water-miscible organic solvent; a surface modifier that is a reaction product between an alkylamine and an organic acid; and an optional pH adjusting agent.
Information query
