Invention Application
- Patent Title: EMBEDDING MAGNETIC MATERIAL IN A CORED OR CORELESS SEMICONDUCTOR PACKAGE
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Application No.: PCT/US2019/026621Application Date: 2019-04-09
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Publication No.: WO2019221843A1Publication Date: 2019-11-21
- Inventor: LEE, Kyu Oh , VADLAMANI, Sai , JAIN, Rahul , ZHAO, Junnan , PARK, Ji Yong , XU, Cheng , KIM, Seo Young
- Applicant: INTEL CORPORATION
- Applicant Address: 2200 Mission College Boulevard Santa Clara, California 95054 US
- Assignee: INTEL CORPORATION
- Current Assignee: INTEL CORPORATION
- Current Assignee Address: 2200 Mission College Boulevard Santa Clara, California 95054 US
- Agency: BERNADICOU, Michael A. et al.
- Priority: US15/982,652 20180517
- Main IPC: H01L23/29
- IPC: H01L23/29 ; H01L23/31 ; H01L23/00 ; H01L23/525
Abstract:
Techniques for fabricating a semiconductor package having magnetic materials embedded therein are described. For one technique, fabrication of package includes: forming a pad and a conductive line on a build-up layer; forming a raised pad structure on the build-up layer, the raised pad comprising a pillar structure on the pad; encapsulating the conductive line and the raised pad structure in a magnetic film comprising one or more magnetic fillers; planarizing a top surface of the magnetic film until top surfaces of the raised pad structure and the magnetic film are co-planar; depositing a primer layer on the top surfaces; removing one or more portions of the primer layer above the raised pad structure to create an opening; and forming a via in the opening on the raised pad structure.
Information query
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