Invention Application
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE AND METHOD FOR FORMING THEREOF
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Application No.: PCT/CN2020/087295Application Date: 2020-04-27
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Publication No.: WO2021217358A1Publication Date: 2021-11-04
- Inventor: WU, Linchun , LI, Shan , XIA, Zhiliang , ZHANG, Kun , ZHOU, Wenxi , HUO, Zongliang
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: No. 88, Weilai Third Road, Donghu New Technology Development Zone
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: No. 88, Weilai Third Road, Donghu New Technology Development Zone
- Agency: NTD UNIVATION INTELLECTUAL PROPERTY AGENCY LTD.
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11565 ; H01L21/823487 ; H01L27/11563 ; H01L27/11568 ; H01L27/11578 ; H01L29/41741
Abstract:
Embodiments of 3D memory devices and methods for forming the same are disclosed. In an example, a 3D memory device includes a P-type doped region of a substrate, an N-type doped semiconductor layer on the P-type doped region, a memory stack including interleaved conductive layers and dielectric layers on the N-type doped semiconductor layer, a channel structure extending vertically through the memory stack and the N-type doped semiconductor layer into the P-type doped region, an N-type doped semiconductor plug extending vertically into the P-type doped region, and a source contact structure extending vertically through the memory stack to be in contact with the N-type doped semiconductor plug.
Information query
IPC分类: