- 专利标题: MINIATURE 3D POSITION-TO-OPTICAL DISPLACEMENT SENSOR
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申请号: PCT/US2021/047234申请日: 2021-08-24
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公开(公告)号: WO2022046687A1公开(公告)日: 2022-03-03
- 发明人: CHEN, Genda , GAO, Jie , GUO, Chuanrui
- 申请人: THE CURATORS OF THE UNIVERSITY OF MISSOURI
- 申请人地址: 316 University Hall
- 专利权人: THE CURATORS OF THE UNIVERSITY OF MISSOURI
- 当前专利权人: THE CURATORS OF THE UNIVERSITY OF MISSOURI
- 当前专利权人地址: 316 University Hall
- 代理机构: GRAY, Scott T.
- 优先权: US63/069,170 2020-08-24
- 主分类号: G01B9/02
- IPC分类号: G01B9/02 ; G01B11/02 ; H01S3/082 ; B82Y15/00
摘要:
A miniature, micrometer-accuracy, three-dimensional (3D) position-to-optical displacement sensor that has at least one extrinsic Fabry-Perot interferometer (EFPI) in Z direction and a series of plasmonic metasurface resonators with distinctive wavelength-selective characteristics in X and Y directions. The interferometer comprises at least one single mode optic fiber for light propagation, and a substrate mirror to create a light interference fringe as a function of distance between the mirror and the distal end of the optic fiber. Each plasmonic resonator is capable of modifying the substrate mirror and comprises an array of multiple unit nanostructure unit cells that are arranged in a two-dimensional (2D) square lattice or array in the X - Y plane. The nanostructure unit cells are preferably inscribed in the top layer of a three-layer thin film via the focused ion beam (FIB).