Invention Application
- Patent Title: TWO-DIMENSIONAL MATERIAL AND HETEROSTRUCTURES ON AN INTERMEDIATE POLYMER TRANSFER LAYER AND THEIR FABRICATION
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Application No.: PCT/EP2021/085690Application Date: 2021-12-14
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Publication No.: WO2022129049A1Publication Date: 2022-06-23
- Inventor: SHIVAYOGIMATH, Abhay , BØGGILD, Peter , BOOTH, Timothy John
- Applicant: DANMARKS TEKNISKE UNIVERSITET
- Applicant Address: Anker Engelunds Vej 101
- Assignee: DANMARKS TEKNISKE UNIVERSITET
- Current Assignee: DANMARKS TEKNISKE UNIVERSITET
- Current Assignee Address: Anker Engelunds Vej 101
- Agency: HØIBERG P/S
- Priority: EP20213739.4 2020-12-14
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/18 ; H01L21/683 ; C01B32/19
Abstract:
The present disclosure relates to a method of manufacturing a water-soluble transfer stack comprising multilayer two-dimensional material, the method comprising: i. Providing a growth stack comprising a growth substrate and a two-dimensional material layer; ii. Applying an intercalating solution, to the growth stack; iii. Applying a transfer layer comprising a water-soluble polymer film, to the growth stack; iv. Delaminating the water-soluble polymer film together with the two-dimensional material layer, thereby obtaining a delaminated film, from the growth substrate; and v. Repeating steps i.-iv. a number of times, wherein the delaminated film is used as the transfer layer; thereby manufacturing a water-soluble transfer stack comprising multilayer two-dimensional material.
Information query
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