公开(公告)号：WO2022129049A1

公开(公告)日：2022-06-23

申请号：PCT/EP2021/085690

申请日：2021-12-14

Applicant: DANMARKS TEKNISKE UNIVERSITET

Inventor： SHIVAYOGIMATH, Abhay ,  BØGGILD, Peter ,  BOOTH, Timothy John

IPC: H01L21/02 ,  H01L21/18 ,  H01L21/683 ,  C01B32/19

Abstract: The present disclosure relates to a method of manufacturing a water-soluble transfer stack comprising multilayer two-dimensional material, the method comprising: i. Providing a growth stack comprising a growth substrate and a two-dimensional material layer; ii. Applying an intercalating solution, to the growth stack; iii. Applying a transfer layer comprising a water-soluble polymer film, to the growth stack; iv. Delaminating the water-soluble polymer film together with the two-dimensional material layer, thereby obtaining a delaminated film, from the growth substrate; and v. Repeating steps i.-iv. a number of times, wherein the delaminated film is used as the transfer layer; thereby manufacturing a water-soluble transfer stack comprising multilayer two-dimensional material.

公开(公告)号：WO2018087281A1

公开(公告)日：2018-05-17

申请号：PCT/EP2017/078872

申请日：2017-11-10

Applicant: DANMARKS TEKNISKE UNIVERSITET

Inventor： SHIVAYOGIMATH, Abhay

IPC: C30B25/00 ,  C23C14/58 ,  C23C14/14 ,  C23C8/08

CPC classification number: C23C14/14 ,  C23C14/5846 ,  C23C14/586 ,  C23C14/5866 ,  C23C16/305 ,  C23C16/308 ,  C23C28/322 ,  C23C28/34 ,  C23C28/42 ,  C30B23/025 ,  C30B25/18 ,  C30B29/38 ,  C30B29/46

Abstract: The present invention relates to a method for fabricating large-area, monolayer sheets of a multi-elemental two-dimensional material having the general formula M m X n .

Abstract translation: 本发明涉及一种用于制造具有通式M m N X n的多元二维材料的大面积单层片材的方法