Invention Application
- Patent Title: TRIPOLAR ELECTRODE ARRANGEMENT FOR ELECTROSTATIC CHUCKS
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Application No.: PCT/US2022/019863Application Date: 2022-03-11
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Publication No.: WO2022197536A1Publication Date: 2022-09-22
- Inventor: LEESER, Karl Frederick , BLANK, Richard , HIESTER, Jacob L.
- Applicant: LAM RESEARCH CORPORATION
- Applicant Address: 4650 Cushing Parkway
- Assignee: LAM RESEARCH CORPORATION
- Current Assignee: LAM RESEARCH CORPORATION
- Current Assignee Address: 4650 Cushing Parkway
- Agency: WIGGINS, Michael D. et al.
- Priority: US63/161,647 2021-03-16
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01L21/67 ; C23C16/455 ; C23C16/458 ; H01L21/687 ; H01J37/32
Abstract:
A system comprises a pedestal and a controller. The pedestal is arranged below a showerhead in a processing chamber and includes at least three electrodes to clamp a substrate to the pedestal during processing. The controller is configured to measure a pedestal-to-showerhead gap and at least one of a magnitude and a direction of a relative tilt between the pedestal and the showerhead by sensing impedances between the at least three electrodes and the showerhead.
Information query
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