Invention Application
- Patent Title: POLISHING PADS WITH INTERCONNECTED PORES
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Application No.: PCT/US2022/030549Application Date: 2022-05-23
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Publication No.: WO2022265826A1Publication Date: 2022-12-22
- Inventor: WEWALA GONNAGAHADENIYAGE, Shiyan Akalanka Jayanath , CHOCKALINGAM, Ashwin , FUNG, Jason G. , KAKIREDDY, Veera Raghava Reddy , BARADANAHALLI KENCHAPPA, Nandan , JAWALI, Puneet Narendra , BAJAJ, Rajeev
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: 3050 Bowers Avenue
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: 3050 Bowers Avenue
- Agency: PATTERSON, B. Todd et al.
- Priority: US17/346,399 2021-06-14
- Main IPC: B24B37/24
- IPC: B24B37/24 ; B24B37/26 ; H01L21/67
Abstract:
Embodiments herein generally relate to polishing pads and methods of forming polishing pads. A polishing pad includes a plurality of polishing elements and a plurality of grooves disposed between the polishing elements. Each polishing element includes a plurality of individual posts. Each post includes an individual surface that forms a portion of a polishing surface of the polishing pad and one or more sidewalls extending downwardly from the individual surface. The sidewalls of the plurality of individual posts define a plurality of pores disposed between the posts.
Information query