Invention Application
- Patent Title: THREE-DIMENSIONAL MEMORY DEVICE WITH DOPED SEMICONDUCTOR BRIDGE STRUCTURES AND METHODS FOR FORMING THE SAME
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Application No.: PCT/US2022/028391Application Date: 2022-05-09
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Publication No.: WO2023022769A1Publication Date: 2023-02-23
- Inventor: ITOU, Ryousuke , SAI, Akihisa , IIZUKA, Kenzo
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: 5080 SPECTRUM DRIVE
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: 5080 SPECTRUM DRIVE
- Agency: RADOMSKY, Leon et al.
- Priority: US17/406,463 2021-08-19
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157 ; H01L27/11565 ; H01L27/11575
Abstract:
A vertically alternating sequence of continuous insulating layers and continuous sacrificial material layers is formed over a substrate, and memory opening fill structures including vertical stacks of memory elements are formed through the vertically alternating sequence. Backside trenches are formed to divide the vertically alternating sequence into a plurality of alternating stacks of insulating layers and sacrificial material layers. Bridge structures are formed within each of the backside trenches. The sacrificial material layers are replaced with electrically conductive layers while the bridge structure are present within the backside trenches.
Information query
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