- 专利标题: LOW VOLTAGE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER
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申请号: PCT/IN2022/050851申请日: 2022-09-23
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公开(公告)号: WO2023047417A1公开(公告)日: 2023-03-30
- 发明人: PANWAR, . Brishbhan Singh , GUPTA, Rajat
- 申请人: SENSONICS DEVICES PVT LTD
- 申请人地址: #402 Dbs House,
- 专利权人: SENSONICS DEVICES PVT LTD
- 当前专利权人: SENSONICS DEVICES PVT LTD
- 当前专利权人地址: #402 Dbs House,
- 代理机构: BALA, Arjun Karthik
- 优先权: IN202141043234 2021-09-23
- 主分类号: H01L27/04
- IPC分类号: H01L27/04 ; B81C1/00 ; B81B7/00 ; H04R19/00
摘要:
A method for designing a low voltage capacitive micromachined ultrasonic transducer (CMUT) is provided. The method includes starting from a base silicon wafer includes starting with a N-type Silicon Wafer and growing base oxide by patterning with a metal mask over the base oxide, patterning with a Field Oxide (FOX) Mask over a copper (Cu) or Aluminium (Al) metal (M1) layer that is deposited over the base oxide, depositing polysilicon over the entire silicon wafer and doping the polysilicon with a donor species with a concentration approaching its respective solid solubility limit and subsequently depositing titanium (Ti) over the doped polysilicon that is deposited on the entire silicon wafer and subsequently depositing a dielectric layer. The dielectric layer is standalone Silicon Dioxide or in a stack with Hafnium Oxide or alternatively in a stack with Silicon Nitride or a suitable stack of high relative permittivity materials.
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