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1.发明授权CONTINUOUS DEPOSITION OF INSULATING MATERIAL USING MULTIPLE ANODES ALTERNATED BETWEEN POSITIVE AND NEGATIVE VOLTAGES 失效由几个绝缘材料的连续分离，交替正负电压驻波涂层阳极
公开(公告)号：EP1016122B1
公开(公告)日：2006-07-26
申请号：EP98924885.1
申请日：1998-05-26
IPC分类号： H01J37/34
CPC分类号： H01J37/3438 , H01J37/34 , H01J37/3444
摘要： A method and an apparatus are disclosed for sputter deposition of an insulating material on a substrate (3) in a continuous mode of operation. A novel design for an anode assembly and driving power supply is disclosed to permit this. Single or multiple anodes (11 and 12) are used, which at any given time may be biased negatively with respect to the plasma (2), so that any insulating material which may have been deposited thereupon may be sputtered away so as to provide a clean positive anode to the system, and at least for some period of time is biased positively so that it acts as an anode. The removal of any insulating material which may have formed on the anode structure permits its continuing effective use in collecting electrons from the plasma when it is biased positively, and therefore its continuing effective use as an anode for the system, permitting continuous operation of the system.
摘要翻译： 的方法和装置游离缺失光盘为在操作的连续模式中的底物（3）的阴极材料的溅射沉积。 一种新颖的设计为阳极的组件和驱动电源是游离缺失盘，以允许此。 单个或多个阳极（11和12）被使用，其中在任何给定时间可以相对于负偏压到等离子体（2），所以没有哪个可能已经沉积在其上可被溅射掉，以便提供一个任何阴极材料 清洁正阳极到系统中，并至少在一段时间内被偏置正所以没有它充当阳极。 其可具有在阳极结构中形成的任何绝缘材料的去除允许在当正偏压从等离子体收集电子其持续有效地利用，并且该系统的因此它的持续有效用作阳极的系统的，允许continuousOperation
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公开(公告)号：EP1155358A1
公开(公告)日：2001-11-21
申请号：EP99967731.3
申请日：1999-12-29
IPC分类号： G05F1/12
CPC分类号： G05F1/12
摘要： Circuitry and methods for regulating alternating current regulation uses energy storage and release principles to boost or buck voltage to permit regulated ac operation with parallel and series bi-directional switch elements (12) and (13) operated at either variable duty cycles or frequencies to accommodate bipolar ac operation. Each bi-directional switch element may include a diode bridge (8) or (10) and directionally limited switches such as semiconductor switches. The system can be used to regulate ac even during sub-cycle dips, can be used to simulate controlled dips, can be used to correct power factor for loads, and can be applied in multiphase operations.
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4.发明公开CONTINUOUS DEPOSITION OF INSULATING MATERIAL USING MULTIPLE ANODES ALTERNATED BETWEEN POSITIVE AND NEGATIVE VOLTAGES 失效由几个绝缘材料的连续分离，交替正负电压驻波涂层阳极
公开(公告)号：EP1016122A1
公开(公告)日：2000-07-05
申请号：EP98924885.1
申请日：1998-05-26
IPC分类号： H01J37/34
CPC分类号： H01J37/3438 , H01J37/34 , H01J37/3444
摘要： A method and an apparatus are disclosed for sputter deposition of an insulating material on a substrate (3) in a continuous mode of operation. A novel design for an anode assembly and driving power supply is disclosed to permit this. Single or multiple anodes (11 and 12) are used, which at any given time may be biased negatively with respect to the plasma (2), so that any insulating material which may have been deposited thereupon may be sputtered away so as to provide a clean positive anode to the system, and at least for some period of time is biased positively so that it acts as an anode. The removal of any insulating material which may have formed on the anode structure permits its continuing effective use in collecting electrons from the plasma when it is biased positively, and therefore its continuing effective use as an anode for the system, permitting continuous operation of the system.
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5.发明公开FREQUENCY SELECTED, VARIABLE OUTPUT INDUCTOR HEATER SYSTEM AND METHOD 失效具有输出功率可调频率EQUIPPED特定的感应加热系统和方法
公开(公告)号：EP0995340A1
公开(公告)日：2000-04-26
申请号：EP98933258.0
申请日：1998-07-08
CPC分类号： H01L21/67109 , C23C16/46 , C30B25/10 , H05B6/06 , H05B6/44
摘要： An induction heating system using a plurality of zones (7, 8, and 9) in a coil (1) provides selective heating control for better uniformity especially for semiconductor and other thin film processing applications. By arranging the zones (7, 8, and 9) to have different resonance frequencies, the power supply (20) may control the various zones (7, 8, and 9) by altering its frequency output. The power supply (20) may also act to control the differential heating by switching among zones in conjunction with the frequency control, by sweeping through a variety of frequencies, by simultaneously providing power over different frequencies, by altering the residence time at each frequency, or by outputting different powers to each frequency or the like. Each zone may thus be tuned as appropriate to achieve the desired induction heating characteristic.
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