公开(公告)号：EP2273279A1

公开(公告)日：2011-01-12

申请号：EP10012371.0

申请日：2006-04-27

申请人： AEHR TEST SYSTEMS, INC.

发明人： Richmond, Donald P II ,  Burke, Paul W. ,  Cao, Doan D. ,  Tomic, James F. ,  Vu, Long V. ,  Deboe, Kenneth W. ,  Uher, Frank O. ,  Jovanovic, Jovan ,  Lindsey, Scott E. ,  Maenner, Thomas T. ,  Shepherd, Patrick M. ,  Tyson, Jeffrey L. ,  Carbone, Mark C.

IPC分类号： G01R31/28

CPC分类号： G01R31/287 ,  G01R31/003 ,  G01R31/26 ,  G01R31/2642 ,  G01R31/2851 ,  G01R31/2855 ,  G01R31/2863 ,  G01R31/2868 ,  G01R31/2872 ,  G01R31/2877 ,  G01R31/2886 ,  G01R31/2889 ,  G01R31/2891 ,  G01R31/31924 ,  G06F8/30

摘要： An apparatus is described for burn-in and/or functional testing of microelectronic circuits of unsingulated wafers. A large number of power, ground, and signal connections can be made to a large number of contacts on a wafer. The apparatus has a cartridge that allows for fanning-in of electric paths. A distribution board has a plurality of interfaces that are strategically positioned to provide a dense configuration. The interfaces are connected through flexible attachments to an array of first connector modules. Each one of the first connector modules can be independently connected to a respective one of a plurality of second connector modules, thereby reducing stresses on a frame of the apparatus. Further features include for example a piston that allows for tight control of forces exerted by terminals onto contacts of a wafer.

摘要翻译： 描述了一种用于老化和/或功能测试未压平晶片的微电子电路的装置。 可以对晶片上的大量触点进行大量的电源，接地和信号连接。 该装置具有允许电通路进入的盒。 分配板具有多个接口，其被策略地定位以提供密集配置。 接口通过柔性附件连接到第一连接器模块阵列。 第一连接器模块中的每一个可以独立地连接到多个第二连接器模块中的相应的一个，从而减少装置的框架上的应力。 另外的特征包括例如允许对端子施加到晶片的触点上的力的紧密控制的活塞。