公开(公告)号：EP2203785A1

公开(公告)日：2010-07-07

申请号：EP08841328.1

申请日：2008-10-11

申请人： Carl Zeiss SMT AG

发明人： MANN, Hans-Jürgen ,  ULRICH, Wilhelm ,  MÜLLENDER, Stephan ,  ENKISCH, Hartmut

IPC分类号： G03F7/20

CPC分类号： G02B5/0891 ,  G02B13/143 ,  G02B17/06 ,  G03F7/70175 ,  G03F7/70233

摘要： An imaging optical system (7) has a plurality of mirrors (M1 to M6). These image an object field (4) in an object plane (5) into an image field (8) in an image plane (9). In the imaging optical system (7), the ratio of a maximum angle of incidence of imaging light (15) on reflection surfaces of the mirrors (M1 to M6) and an image-side numerical aperture of the imaging optical system (7) is less than 33.8°. This results in an imaging optical system which offers good conditions for a reflective coating of the mirror, with which a low reflection loss can be achieved for imaging light when passing through the imaging optical system, in particular even at wavelengths in the EUV range of less than 10 nm.