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公开(公告)号：EP0121890B1
公开(公告)日：1989-09-27
申请号：EP84103640.3
申请日：1984-04-03
CPC分类号： G01S15/8906 , G01H3/125 , G01N29/0609 , G01N29/0681 , G01N2291/02827 , G01N2291/02881
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公开(公告)号：EP0187866B1
公开(公告)日：1989-12-06
申请号：EP85903386.2
申请日：1985-07-08
申请人： Chubachi, Noriyoshi
发明人： Chubachi, Noriyoshi
IPC分类号： G01N29/00
CPC分类号： G01S15/8906 , G01N29/06 , G01N29/0609 , G01N2291/0258 , G01N2291/0421 , G01N2291/0422
摘要： A transmitting, focusing, ultrasonic wave transducer (20) is excited by high-frequency pulses sent from a high-frequency pulse generator (1); the leakage elastic surface waves are excited in a sample (6) by the focusing ultrasonic wave beams of the transducer (20); the waves emitted again are received by a receiving focusing ultrasonic wave transducer (24); the received signals are sent to a mixer (23) where a difference in phase is detected relative to reference signals produced from a high-frequency oscillator (18) in the high-frequency pulse generator (1); and the detected output is supplied as a display signal to a display (9 or 14). The transducers (20, 24) and the sample (6) are relatively moved by a moving device (7 or 10) two-dimensionally on a plane parallel to the surface of the sample or at right angles to the surface of the sample. In synchronism with this movement, the surface of the display (9 or 14) is swept to obtain an ultrasonic microscopic image or a V(z) curve on the display surface.
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公开(公告)号：EP0121890A2
公开(公告)日：1984-10-17
申请号：EP84103640.3
申请日：1984-04-03
CPC分类号： G01S15/8906 , G01H3/125 , G01N29/0609 , G01N29/0681 , G01N2291/02827 , G01N2291/02881
摘要： An ultrasonic transmitter-receiver (16) for radiating a focused ultrasonic beam (39) and a sample (23) are moved relative to each other in the axial direction of the ultrasonic beam. A reflected wave from the sample (23) is received and a curve V(Z) of variations in the level of the reflected wave with respect to the relative movement is obtained. A reference level of interference of a directly reflected wave and a leaky elastic wave is substracted from V(Z) to perform waveform processing. The waveform processing output is subjected to a waveform analysis, and from the analysis results, the velocity and/or the attenuation of the leaky elastic wave are calculated.
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4.发明授权Apparatus for measuring the velocity of ultrasonic sound in terms of V(z) characteristics and ultrasonic microscope using that apparatus 失效用于由V（z）的测量来确定的超声波速度，以及超声波显微镜使用设备的设备
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5.发明公开Apparatus for measuring the velocity of ultrasonic sound in terms of V(z) characteristics and ultrasonic microscope using that apparatus 失效装置，用于测量超声波速度为V（z）的函数，并且与使用该装置的超声波显微镜。
公开(公告)号：EP0488084A2
公开(公告)日：1992-06-03
申请号：EP91119977.6
申请日：1991-11-22
CPC分类号： G01H5/00
摘要： The ultrasonic sound velocity measuring apparatus or ultrasonic microscope of the present invention which rely on the V(z) characteristics are characterized by the following:
the sample (11) to be measured or examined is moved relative to a focusing acoustic probe (8) from its focal point to a defocus point closer to the probe (8); the intensity of a first reception signal in the peripheral portion (8a) of the transducer (8a, 8b) of the acoustic probe (8) as obtained therefrom in response to said relative movement of the sample (11), the phase difference between the first reception signal and either the signal for driving the acoustic probe (8) or the corresponding reference signal, the intensity of a second reception signal in the central portion (8a) of the transducer (8a, 8b) of the acoustic probe (8) as obtained therefrom in response to said relative movement of the sample (11), and the phase difference between the second reception signal and either the signal for driving the acoustic probe (8) or the corresponding reference signal are subjected to more than one sampling at time intervals corresponding to positions in the defocus direction; data on the intensity and phase difference of the plurality of the first reception signals as obtained by the sampling step as well as data on the intensity and phase difference of the plurality of the second reception signals as obtaied by the sampling step are obtained as data for vector functions, with respect to the position in the defocus direction, of the wave of interference between the leaky elastic surface wave component and the reflected wave component near the central axis of the acoustic probe (8) so as to calculate the velocity of the leaky elastic surface wave component.摘要翻译： 依赖于在V的超声波声速测定装置或本发明的超声波显微镜（z）的特性由以下为特征的：相对于一聚焦声学探头的样品（11）将被测量或已审查的移动（8）从 其焦点到的散焦点更靠近所述样品（8）; 在换能器的周缘部分（8a）的第一接收信号的强度（8A，8B），其从响应于所述样品（11）的所述相对运动获得那里的声学探头（8）时，之间的相位差的 第一接收信号和任一用于驱动所述声学探头（8）或相应的参考信号，第二接收信号的换能器的中央部分（8a）的强度信号（8A，8B）的声学探头（8） 从响应于所述样品（11）的所述相对运动获得那里，并且所述第二接收信号和任一用于驱动所述声学探头（8）或相应的参考信号的信号之间的相位差在经受大于一个采样 的时间间隔对应于散焦方向上的位置; 由采样步骤以及在所述第二接收信号的所述多个强度和相位差数据所获得如由采样步骤obtaied在所述第一接收信号的多个强度和相位差数据获得作为数据 矢量的功能，相对于在散焦方向上的位置漏泄弹性表面波元件和靠近所述声学探头（8）的中心轴线的反射波分量之间的电波干扰的，以便计算泄漏的速度 弹性表面波元件。
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公开(公告)号：EP0187866A1
公开(公告)日：1986-07-23
申请号：EP85903386.2
申请日：1985-07-08
申请人： Chubachi, Noriyoshi
发明人： Chubachi, Noriyoshi
IPC分类号： G01N29/00
CPC分类号： G01S15/8906 , G01N29/06 , G01N29/0609 , G01N2291/0258 , G01N2291/0421 , G01N2291/0422
摘要： @ A transmitting, focusing, ultrasonic wave transducer (20) is excited by high-frequency pulses sent from a high-frequency pulse generator (1); the leakage elastic surface waves are excited in a sample (6) by the focusing ultrasonic wave beams of the transducer (20); the waves emitted again are received by a receiving focusing ultrasonic wave transducer (24); the received signals are sent to a mixer (23) where a difference in phase is detected relative to reference signals produced from a high-frequency oscillator (18) in the high-frequency pulse generator (1); and the detected output is supplied as a display signal to a display (9 or 14). The transducers (20, 24) and the sample (6) are relatively moved by a moving device (7 or 10) two-dimensionally on a plane parallel to the surface of the sample or at right angles to the surface of the sample. In synchronism with this movement, the surface of the display (9 or 14) is swept to obtain an ultrasonic microscopic image or a V(z) curve on the display surface.
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7.发明公开Apparatus for measuring the velocity of ultrasonic sound in terms of V(z) characteristics and ultrasonic microscope using that apparatus 失效用于测量V（Z）特征和超声波显微镜使用该装置的超声波声速的装置
公开(公告)号：EP0488084A3
公开(公告)日：1993-03-17
申请号：EP91119977.6
申请日：1991-11-22
CPC分类号： G01H5/00
摘要： The ultrasonic sound velocity measuring apparatus or ultrasonic microscope of the present invention which rely on the V(z) characteristics are characterized by the following:
the sample (11) to be measured or examined is moved relative to a focusing acoustic probe (8) from its focal point to a defocus point closer to the probe (8); the intensity of a first reception signal in the peripheral portion (8a) of the transducer (8a, 8b) of the acoustic probe (8) as obtained therefrom in response to said relative movement of the sample (11), the phase difference between the first reception signal and either the signal for driving the acoustic probe (8) or the corresponding reference signal, the intensity of a second reception signal in the central portion (8a) of the transducer (8a, 8b) of the acoustic probe (8) as obtained therefrom in response to said relative movement of the sample (11), and the phase difference between the second reception signal and either the signal for driving the acoustic probe (8) or the corresponding reference signal are subjected to more than one sampling at time intervals corresponding to positions in the defocus direction; data on the intensity and phase difference of the plurality of the first reception signals as obtained by the sampling step as well as data on the intensity and phase difference of the plurality of the second reception signals as obtaied by the sampling step are obtained as data for vector functions, with respect to the position in the defocus direction, of the wave of interference between the leaky elastic surface wave component and the reflected wave component near the central axis of the acoustic probe (8) so as to calculate the velocity of the leaky elastic surface wave component.-
公开(公告)号：EP0121890A3
公开(公告)日：1986-01-08
申请号：EP84103640
申请日：1984-04-03
发明人： Chubachi, Noriyoshi
CPC分类号： G01S15/8906 , G01H3/125 , G01N29/0609 , G01N29/0681 , G01N2291/02827 , G01N2291/02881
摘要： An ultrasonic transmitter-receiver (16) for radiating a focused ultrasonic beam (39) and a sample (23) are moved relative to each other in the axial direction of the ultrasonic beam. A reflected wave from the sample (23) is received and a curve V(Z) of variations in the level of the reflected wave with respect to the relative movement is obtained. A reference level of interference of a directly reflected wave and a leaky elastic wave is substracted from V(Z) to perform waveform processing. The waveform processing output is subjected to a waveform analysis, and from the analysis results, the velocity and/or the attenuation of the leaky elastic wave are calculated.
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