摘要:
A laser diode in which a laser diode chip (111) having a light-emitting end face (33) is resin-encapsulated by means of an encapsulating resin layer (10) constituted by an epoxy-based resin or the like. An end-face-breakage preventing layer (10) formed of a silicon-based resin having a high coefficient of light absorption in the wavelength band of a laser beam and a high bond energy is formed on the light-emitting end face (33). The end-face-breakage preventing layer (10) has a thickness of approximately 20 to 30 µm.
摘要:
A force sensor comprises a substrate having a movable unit which is displaceable in response to one of an applied force and acceleration; an electron emission unit having a cathode for emitting electrons in accordance with an applied potential; an electron absorption unit having an anode for capturing electrons emitted from the cathode, the electron emission unit and the electron absorption unit being formed on a surface of the substrate; and a control unit for, on the basis of the displacement of the movable unit, controlling the electron capturing efficiency of the anode with respect to electrons emitted from the cathode.
摘要:
A concave portion (21) having a V-shaped cross section is dug in a semiconductor region (10) of a chip, and a surface of the semiconductor region inclusive of the concave portion (21) is covered with an insulation film (22). A wiring film (23) connected to an integrated circuit device is disposed on the insulation film. A protection film (24) covering the surface of the chip is provided with a window (24a) to expose the concave portion and a portion of the wiring film. The window is covered with a thin metal subbing film (25) connected to the wiring film. A metal protrusion (26) for a bump electrode (20) is provided by an electroplating process so as to protrude from the concave portion.
摘要:
A laser diode in which a laser diode chip (111) having a light-emitting end face (33) is resin-encapsulated by means of an encapsulating resin layer (10) constituted by an epoxy-based resin or the like. An end-face-breakage preventing layer (10) formed of a silicon-based resin having a high coefficient of light absorption in the wavelength band of a laser beam and a high bond energy is formed on the light-emitting end face (33). The end-face-breakage preventing layer (10) has a thickness of approximately 20 to 30 µm.
摘要:
A force sensor comprises a substrate having a movable unit which is displaceable in response to one of an applied force and acceleration; an electron emission unit having a cathode for emitting electrons in accordance with an applied potential; an electron absorption unit having an anode for capturing electrons emitted from the cathode, the electron emission unit and the electron absorption unit being formed on a surface of the substrate; and a control unit for, on the basis of the displacement of the movable unit, controlling the electron capturing efficiency of the anode with respect to electrons emitted from the cathode.