公开(公告)号：EP2238428A2

公开(公告)日：2010-10-13

申请号：EP09706263.2

申请日：2009-02-02

申请人： Imperial Innovations Limited

发明人： NOVAK, Pavel ,  LI, Chao ,  SHEVCHUK, Andrew ,  OSTANIN, Victor ,  KLENERMAN, David ,  KORCHEV, Yuri ,  FROLENKOV, Gregory ,  CLARKE, Richard

IPC分类号： G01N13/12 ,  G12B21/02

CPC分类号： G01Q60/44 ,  B82Y35/00 ,  G01Q10/00 ,  G01Q10/02 ,  G01Q10/065

摘要： A method for interrogating a surface using scanning ion conductance microscopy (SICM), comprising the steps of: a) repeatedly bringing a SICM probe into proximity with the surface at discrete, spaced locations in a region of the surface and measuring surface height at each location; b) estimating surface roughness or other characteristic for the region based upon the surface height measurements; and c) repeatedly bringing the probe into proximity with the surface at discrete, spaced locations in the region, the number and location of which is based upon the estimated surface roughness or other characteristic in the region, and obtaining an image of the region with a resolution adapted to the surface roughness or other characteristic.

摘要翻译： 本发明涉及使用扫描离子电导显微镜（SICM）询问表面的方法。 在一个实施例中，本发明的方法包括以下步骤：a）在表面的一个区域和每个位置的测量表面高度处，在离散的间隔位置处重复地使SICM探针接近表面; b）基于表面高度测量来估计该区域的表面粗糙度或其它特征; 以及c）在所述区域中的离散的间隔位置处重复地使所述探针靠近所述表面，所述位置的数量和位置基于所述区域中估计的表面粗糙度或其它特征，并且获得所述区域的图像 分辨率适应于表面粗糙度或其他特性。