SCANNING PROBE MICROSCOPE AND CONTROL METHOD THEREFOR
    3.
    发明公开
    SCANNING PROBE MICROSCOPE AND CONTROL METHOD THEREFOR 审中-公开
    GRID探针显微镜及其控制方法

    公开(公告)号:EP2767837A4

    公开(公告)日:2015-05-27

    申请号:EP12839241

    申请日:2012-10-03

    申请人: OLYMPUS CORP

    发明人: SAKAI NOBUAKI

    IPC分类号: G01Q60/32

    摘要: A scanning probe microscope includes a cantilever 12 having a probe 11 at a free thereof, a displacement detection unit 15 to output a displacement signal of the cantilever 12, a vibrating unit 14 to vibrate the cantilever 12, and a scanning unit 20 to three-dimensionally relatively move the sample 19 and probe 11. A mixed signal generation unit 30 includes an amplitude information detecting section 31 to provide a vibrating signal to the vibrating unit 14 and generate an amplitude signal including information of an amplitude of the displacement signal, and a phase difference information detecting section 32 to generate a phase signal including information of a phase difference between the displacement signal and the synchronous signal, and adds the displacement signal and the synchronous signal to generate a mixed signal. A controller 25 to control the scanning unit 20 includes a Z control section 26, which controls the distance between the sample 19 and the probe 11 on the basis of the mixed signal.

    SEALED-TYPE AFM CELL
    4.
    发明公开
    SEALED-TYPE AFM CELL 有权
    密封型原子力显微镜

    公开(公告)号:EP2781925A1

    公开(公告)日:2014-09-24

    申请号:EP12849122.2

    申请日:2012-11-15

    IPC分类号: G01Q30/14 G01Q60/24

    摘要: Provided is a sealed atomic force microscope (AFM) cell in which measurement accuracy does not decrease and the types of observation liquids are not limited. A sealed AFM cell (100) according to the present invention includes: a cantilever (120) including a probe; a sample holder (132) for fixing the sample; a scanner (134) for moving the sample holder (132); a lid part (122) which holds the cantilever (120) so as to position the probe near a measurement surface of the sample; and a main body part (136) which is a component for holding the scanner (134) and positioned opposite the lid part (122) with the sample in between, in which the lid part (122) and the main body part (136) are joined via a sealing liquid to seal the observation liquid inside a space formed by the lid part (122), the main body part (136), and the sealing liquid, the sealing liquid being different from the observation liquid and not in contact with the observation liquid.

    摘要翻译: 提供了一种密封原子力显微镜(AFM)单元,其中测量精度不降低并且观察液的类型不受限制。 根据本发明的密封的AFM单元(100)包括:悬臂(120),其包括探针; 样品固定器(132),用于固定样品; 扫描仪(134),用于移动样本架(132); 保持所述悬臂(120)以使所述探针位于所述试样的测定面附近的盖部(122) (122)和主体部(136)之间夹着检体而与盖部(122)相对配置的作为保持扫描仪(134)的部件的主体部(136) 通过密封液接合,将观察液密封在由盖部(122),主体部(136)和密封液形成的空间内,该密封液与观察液不同且不接触 观察液。

    POTENTIAL-MEASURING DEVICE, AND ATOMIC FORCE MICROSCOPE
    7.
    发明公开
    POTENTIAL-MEASURING DEVICE, AND ATOMIC FORCE MICROSCOPE 审中-公开
    潜在的意大利人在ATOMKRAFTMIKROSKOP

    公开(公告)号:EP2757380A1

    公开(公告)日:2014-07-23

    申请号:EP12832395.3

    申请日:2012-09-12

    IPC分类号: G01Q60/30 G01Q30/14 G01R29/12

    摘要: A potential measurement device (100) according to the present invention includes: an electrode (104); a displacement measurement unit (212) which outputs a voltage corresponding to an electrostatic force between the electrode and the sample; a first alternating-current power supply (101) which applies a first alternating-current voltage between the electrode and the sample; a second alternating-current power supply (102) which adds, to the first alternating-current voltage, a second alternating-current voltage having a frequency different from a frequency of the first alternating-current voltage, and applies the added voltage; and a signal detection unit (218) which outputs a magnitude of a particular frequency component contained in the output from the displacement measurement unit, in which the signal detection unit extracts, from the output by the displacement measurement unit, and outputs, to a potential calculation unit which calculates potential, (i) a magnitude and a phase of a frequency component of a frequency identical to the frequency of the first alternating-current voltage and (ii) a magnitude of a frequency component of a frequency identical to a frequency equivalent to a difference between the frequency of the first alternating-current voltage and the frequency of the second alternating-current voltage, so that the potential measurement device measures the surface potential of the sample.

    摘要翻译: 根据本发明的电位测量装置(100)包括:电极(104); 位移测量单元,其输出对应于电极和样品之间的静电力的电压; 第一交流电源(101),其在所述电极和所述样品之间施加第一交流电压; 第二交流电源(102),其向所述第一交流电压添加具有与所述第一交流电压的频率不同的频率的第二交流电压,并施加所述相加的电压; 以及信号检测单元,其输出信号检测单元从位移测量单元的输出中包含的特定频率分量的大小,其中信号检测单元从位移测量单元的输出中提取,并将其输出到电位 计算电位的计算单元,(i)与第一交流电压的频率相同的频率的频率分量的幅度和相位,以及(ii)与频率等效的频率的频率分量的幅度 到第一交流电压的频率和第二交流电压的频率之间的差,使得电位测量装置测量样品的表面电位。

    Scanning method for scanning a sample with a probe
    8.
    发明公开
    Scanning method for scanning a sample with a probe 审中-公开
    用探针扫描样品的扫描方法

    公开(公告)号:EP2584363A1

    公开(公告)日:2013-04-24

    申请号:EP12188958.8

    申请日:2012-10-18

    申请人: FEI COMPANY

    摘要: The method relates to a method of scanning a sample. Scanning a sample is typically done by scanning the sample with a probe along a multitude of parallel lines. In prior art scan methods a sample is scanned multiple times with a nominally identical scan pattern. The invention is based on the insight that the coherence between adjacent points in a direction along the scan direction is much better than the coherence of adjacent points perpendicular to the scan direction. By combining two images that are scanned perpendicular to each other, it should thus be possible to form an image making use of the improved coherence (due to shorter temporal distance) in both directions. The method thus involves scanning the sample with two scan patterns, the lines of one scan pattern preferably perpendicular to the lines of the other scan pattern. Hereby it is possible to use the temporal coherence of scan points on a line of one scan pattern to align the lines of the other scan pattern, and vice versa.

    摘要翻译: 该方法涉及扫描样本的方法。 通常通过沿着多条平行线用探针扫描样品来扫描样品。 在现有技术的扫描方法中,用标称相同的扫描图案多次扫描样品。 本发明基于以下认识:沿着扫描方向的方向上的相邻点之间的相干性比垂直于扫描方向的相邻点的相干性好得多。 通过组合彼此垂直扫描的两个图像,因此应该能够在两个方向上利用改善的相干性(由于更短的时间距离)而形成图像。 因此该方法涉及用两种扫描图案扫描样品,一种扫描图案的线优选垂直于另一种扫描图案的线。 由此可以使用一个扫描图案的线上的扫描点的时间相干性来对齐另一个扫描图案的线,反之亦然。

    SCANNING ION CONDUCTANCE MICROSCOPY
    9.
    发明公开
    SCANNING ION CONDUCTANCE MICROSCOPY 审中-公开
    MIKROSKOPISCHE IONENLEITUNGSERFASSUNG

    公开(公告)号:EP2238428A2

    公开(公告)日:2010-10-13

    申请号:EP09706263.2

    申请日:2009-02-02

    IPC分类号: G01N13/12 G12B21/02

    摘要: A method for interrogating a surface using scanning ion conductance microscopy (SICM), comprising the steps of: a) repeatedly bringing a SICM probe into proximity with the surface at discrete, spaced locations in a region of the surface and measuring surface height at each location; b) estimating surface roughness or other characteristic for the region based upon the surface height measurements; and c) repeatedly bringing the probe into proximity with the surface at discrete, spaced locations in the region, the number and location of which is based upon the estimated surface roughness or other characteristic in the region, and obtaining an image of the region with a resolution adapted to the surface roughness or other characteristic.

    摘要翻译: 本发明涉及使用扫描离子电导显微镜(SICM)询问表面的方法。 在一个实施例中,本发明的方法包括以下步骤:a)在表面的一个区域和每个位置的测量表面高度处,在离散的间隔位置处重复地使SICM探针接近表面; b)基于表面高度测量来估计该区域的表面粗糙度或其它特征; 以及c)在所述区域中的离散的间隔位置处重复地使所述探针靠近所述表面,所述位置的数量和位置基于所述区域中估计的表面粗糙度或其它特征,并且获得所述区域的图像 分辨率适应于表面粗糙度或其他特性。

    FULLY DIGITAL CONTROLLER FOR CANTILEVER-BASED INSTRUMENTS
    10.
    发明公开
    FULLY DIGITAL CONTROLLER FOR CANTILEVER-BASED INSTRUMENTS 审中-公开
    基于悬臂式仪表的全数字控制器

    公开(公告)号:EP1573299A2

    公开(公告)日:2005-09-14

    申请号:EP03813851.7

    申请日:2003-12-18

    IPC分类号: G01N13/16

    摘要: A controller for cantilever-based instruments, including atomic force microscopes, molecular force probe instruments, high-resolution profilometers and chemical or biological sensing probes. The controller samples the output of the photo-detector commonly used to detect cantilever deflection in these instruments with a very fast analog/digital converter (ADC). The resulting digitized representation of the output signal is then processed with field programmable gate arrays and digital signal processors without making use of analog electronics. Analog signal processing is inherently noisy while digital calculations are inherently "perfect" in that they do not add any random noise to the measured signal. Processing by field programmable gate arrays and digital signal processors maximizes the flexibility of the controller because it can be varied through programming means, without modification of the controller hardware.

    摘要翻译: 基于悬臂的仪器的控制器,包括原子力显微镜,分子力探头仪器,高分辨率轮廓仪和化学或生物传感探头。 控制器通过一个非常快速的模拟/数字转换器(35)对通常用于检测这些仪器中的悬臂偏转的光电检测器的输出进行采样。 然后用现场可编程门阵列(31)和数字信号处理器(32)处理输出信号的数字化表示,而不使用模拟电子器件。