公开(公告)号：EP3111235B1

公开(公告)日：2024-05-29

申请号：EP15711060.2

申请日：2015-02-27

IPC分类号： G01Q10/04 ,  G01Q10/06 ,  G01Q70/10

CPC分类号： G01Q10/045 ,  G01Q70/10 ,  G01Q10/065

公开(公告)号：EP3170008A4

公开(公告)日：2018-06-06

申请号：EP15822414

申请日：2015-07-14

申请人： UNIV RUTGERS

发明人： ZOU QINGZE ,  REN JUAN ,  LIU JIANGBO

IPC分类号： G01Q10/06 ,  G01Q60/34

CPC分类号： G01Q10/065 ,  G01Q60/34

摘要： A method for imaging a sample using a high speed dynamic mode atomic force microscope may include scanning a tip of a cantilever probe over a surface of the sample, regulating a vibration amplitude of the tip to remain constant at a set point value (Aset), via a first signal generated in a first feedback controller, measuring a mean tapping deflection of the tip, regulating the mean tapping deflection via a second signal generated in a second feedback controller, tracking and measuring an adjustment to the measured mean tapping deflection during the regulating. The method may further include generating an image topography of the sample based on the first signal, the second signal, and the measured adjustment of the mean tapping deflection of the cantilever probe.

公开(公告)号：EP3077831A4

公开(公告)日：2017-10-18

申请号：EP14867765

申请日：2014-12-08

申请人： BRUKER NANO INC

发明人： LIU CHANGCHUN ,  PITTENGER BEDE ,  HU SHUIQING ,  SU CHANMIN

IPC分类号： G01Q30/06 ,  G01Q10/06

CPC分类号： G01Q10/065 ,  G01Q10/06 ,  G01Q30/06

摘要： An atomic force microscope (AFM) and corresponding method to provide low force (sub-20 pN) AFM control and mechanical property measurement is provided. The preferred embodiments employ real-time false deflection correction/discrimination by adaptively modifying the drive ramp to accommodate to deflection artifacts.

公开(公告)号：EP3226009A1

公开(公告)日：2017-10-04

申请号：EP17162737.5

申请日：2017-03-24

申请人： Hitachi High-Tech Science Corporation

发明人： SHIGENO, Masatsugu ,  WATANABE, Kazutoshi

IPC分类号： G01Q10/06

CPC分类号： G01Q10/02 ,  G01Q10/065

摘要： The present invention provides a scanning probe microscope and a probe contact detection method which are capable of improving a phenomenon that when the sample surface with which the probe is in contact is an inclined plane, the value of the pressing force to detect the contact between the probe and sample surface is changed as compared to the horizontal plane.
A scanning probe microscope for scanning a surface of a sample with a probe by bringing the probe into contact with the surface of the sample, comprises a cantilever having the probe at its tip; a displacement detection unit to detect both a bending amount and a torsion amount of the cantilever; and a contact determination unit to determine a primary contact of the probe with the surface of the sample, based on the bending amount and the torsion amount detected by the displacement detection unit in all directions from an undeformed condition of the cantilever.

摘要翻译： 本发明提供一种扫描探针显微镜和探针接触检测方法，其能够改善这样的现象，即当探针接触的样本表面是斜面时，用于检测 探头和样品表面与水平面相比发生了变化。 扫描探针显微镜用于通过使探针与样品表面接触来用探针扫描样品的表面，该扫描探针显微镜包括在其尖端具有探针的悬臂; 位移检测单元，用于检测悬臂的弯曲量和扭转量; 以及接触确定单元，用于基于从所述悬臂的未变形状态在所有方向上由所述位移检测单元检测到的所述弯曲量和所述扭转量来确定所述探针与所述样品的所述表面的主接触。

公开(公告)号：EP3121709A1

公开(公告)日：2017-01-25

申请号：EP15178389.1

申请日：2015-07-24

申请人： Universität Basel

发明人： BUBENDORF, Alexander ,  MEYER, Ernst ,  GLATZEL, Thilo

IPC分类号： G06F7/544 ,  G01Q10/06 ,  B82Y35/00

CPC分类号： G06F7/5446 ,  G01Q10/065 ,  G01R25/00

摘要： The invention relates to a method for estimating a phase shift between an in-phase component and a quadrature component provided by a lock-in amplifier, comprising the steps of: Providing an input signal (U), Providing a first reference signal (V ref ), Providing a second reference signal ( V ref, + 90° phase shifted ) that is phase shifted by +90° with respect to the first reference signal (V ref ), Calculating said in-phase component (X) with the lock-in amplifier, which calculation comprises at least multiplying said first reference signal with the input signal and low-pass filtering the result to yield said in-phase component (x), Calculating said quadrature component (Y) with the lock-in amplifier, which calculation comprises at least multiplying said second reference signal with the input signal and low-pass filtering the result to yield said quadrature component (Y), and Estimating the phase (Z) using the in-phase component and the quadrature component by means of a CORDIC algorithm.

摘要翻译： 本发明涉及一种用于估计由锁相放大器提供的同相分量和正交分量之间的相移的方法，包括以下步骤：提供输入信号（U），提供第一参考信号（V ref ），提供相对于第一参考信号（V ref）相移90°的第二参考信号（V ref，+ 90°相移），用锁定相位分量计算所述同相分量（X） 在放大器中，所述计算包括至少将所述第一参考信号与输入信号相乘，并对结果进行低通滤波以产生所述同相分量（x），用锁定放大器计算所述正交分量（Y），其中 计算包括至少将所述第二参考信号与输入信号相乘，并对结果进行低通滤波以产生所述正交分量（Y），以及通过使用同相分量和正交分量来估计相位（Z） CORDIC alg orithm。

公开(公告)号：EP2791688A1

公开(公告)日：2014-10-22

申请号：EP12812908.7

申请日：2012-12-12

申请人： Universität Basel

发明人： PLODINEC, Marija ,  LOPARIC, Marko ,  LIM, Roderick YH

IPC分类号： G01Q10/06 ,  B82Y35/00

CPC分类号： G01Q10/06 ,  B82Y35/00 ,  G01Q10/065

摘要： The present invention relates to a method for controlling a scanning probe microscope having a probe (2) with a tip (21) for interacting with a sample (4), and a nanoscanner (1) for retaining the sample (4) or the probe (2), comprising the steps of monitoring the extension of the piezo element (1) along a first direction (R) along which the tip (21) is moved towards the sample (4), and adjusting the level of the probe (2) along the first direction (R) by means of an additional actuator (3), when the nanoscanner (1) exhibits an extension below or above a threshold value. The invention further relates to a device(100) for controlling a scanning probe microscope.

摘要翻译： 本发明涉及一种用于控制扫描探针显微镜的方法，该扫描探针显微镜具有带有用于与样品（4）相互作用的尖端（21）的探针（2）以及用于保持样品（4）或探针（2）的纳米扫描器（1） （2）的步骤包括以下步骤：监测压电元件（1）沿着第一方向（R）的延伸，沿着第一方向（R），尖端（21）朝向样本（4）移动，并且调整探针（2 ）在纳米扫描仪（1）展现低于或高于阈值的延伸时借助附加的致动器（3）沿第一方向（R）移动。 本发明还涉及一种用于控制扫描探针显微镜的装置（100）。

公开(公告)号：EP2767837A1

公开(公告)日：2014-08-20

申请号：EP12839241.2

申请日：2012-10-03

申请人： Olympus Corporation

发明人： SAKAI, Nobuaki

IPC分类号： G01Q60/32

CPC分类号： G01Q10/00 ,  B82Y35/00 ,  G01Q10/065 ,  G01Q60/32

摘要： A scanning probe microscope includes a cantilever 12 having a probe 11 at a free thereof, a displacement detection unit 15 to output a displacement signal of the cantilever 12, a vibrating unit 14 to vibrate the cantilever 12, and a scanning unit 20 to three-dimensionally relatively move the sample 19 and probe 11. A mixed signal generation unit 30 includes an amplitude information detecting section 31 to provide a vibrating signal to the vibrating unit 14 and generate an amplitude signal including information of an amplitude of the displacement signal, and a phase difference information detecting section 32 to generate a phase signal including information of a phase difference between the displacement signal and the synchronous signal, and adds the displacement signal and the synchronous signal to generate a mixed signal. A controller 25 to control the scanning unit 20 includes a Z control section 26, which controls the distance between the sample 19 and the probe 11 on the basis of the mixed signal.

摘要翻译： 扫描探针显微镜包括具有探针11的悬臂12，位于其中的悬臂12，用于输出悬臂12的位移信号的位移检测单元15，使悬臂12振动的振动单元14，以及扫描单元20〜 尺寸上相对移动样品19和探针11.混合信号产生单元30包括振幅信息检测部分31，以向振动单元14提供振动信号，并产生包括位移信号振幅信息的振幅信号，以及 相位差信息检测部32，生成包括位移信号和同步信号之间的相位差的信息的相位信号，并将位移信号和同步信号相加，生成混合信号。 控制扫描单元20的控制器25包括基于混合信号来控制样品19与探针11之间的距离的Z控制部26。

公开(公告)号：EP2494367A4

公开(公告)日：2014-06-25

申请号：EP10830497

申请日：2010-10-29

申请人： BRUKER NANO INC

发明人： MASSER CARL

IPC分类号： G01Q10/04 ,  G01Q70/04

CPC分类号： B82Y35/00 ,  G01Q10/04 ,  G01Q10/065 ,  G01Q70/04

摘要： A scanning probe microscope (SPM) has a piezoelectric actuator-based tube scanner to which a probe is attached and which is moveable in three planes by the application of a voltage to the piezoelectric tube. A set of flexures flex with the displacement of the tube and strain gauges attached to the flexures measure the flex of the flexures to provide feedback as to the displacement of the tube during the scanning of an object. The strain gauges and flexures form a kinematic sensing frame or arrangement in which a single constraint is provided for each degree of freedom and in which the constraints are at least substantially orthogonal to one another.

公开(公告)号：EP2646838A4

公开(公告)日：2014-04-23

申请号：EP11846886

申请日：2011-11-29

申请人： BRUKER NANO INC

发明人： SHI JIAN ,  HU YAN ,  HU SHUIQING ,  MA JI ,  SU CHANMIN

IPC分类号： G01Q60/32 ,  G01Q10/06

CPC分类号： G01Q10/065 ,  G01Q60/32

摘要： An improved mode of AFM imaging (Peak Force Tapping (PFT) Mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments, including gaseous, fluidic and vacuum. Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

公开(公告)号：EP2577326A2

公开(公告)日：2013-04-10

申请号：EP11787117.8

申请日：2011-05-13

申请人： Massachusetts Institute of Technology

发明人： BURNS, Daniel, James ,  FANTNER, Georg, Ernest ,  YOUCEF-TOUMI, Kamal

IPC分类号： G01Q40/00 ,  G01Q30/00

CPC分类号： G01Q10/065

摘要： A method includes generating, using a sensor, a data signal. The data signal includes a first component based on a motion in a first direction of an actuator configured to provide motion between a sample and a probe in the first direction, the first direction substantially in the plane of the sample; and a second component based on at least one of topographic variations of the sample in a second direction, and a materials property of the sample. The method further includes generating, using a processor, a compensatory signal based on the first component of the data signal generated by the sensor; and providing the compensatory signal to the actuator.