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    TRANSLATING Z AXIS ACCELEROMETER
    3.
    发明公开
    TRANSLATING Z AXIS ACCELEROMETER 审中-公开
    翻译Z轴加速度计

    公开(公告)号：EP3250932A1

    公开(公告)日：2017-12-06

    申请号：EP16703025.3

    申请日：2016-01-21

    申请人： InvenSense, Inc.

    发明人： THOMPSON, Matthew Julian ,  SEEGER, Joseph

    IPC分类号： G01P15/125 ,  G01P15/08 ,  B81B5/00

    CPC分类号： B81B3/0016 ,  B81B3/0037 ,  B81B2201/025 ,  B81B2203/0109 ,  B81B2203/0145 ,  B81B2203/053 ,  G01P15/125 ,  G01P2015/0837 ,  G01P2015/0854 ,  G01P2015/086

    摘要： A system and method for providing a MEMS sensor are disclosed. In a first aspect, the system is a MEMS sensor that comprises a substrate, an anchor region coupled to the substrate, at least one support arm coupled to the anchor region, at least two guiding arms coupled to and moving relative to the at least one support arm, a plurality of sensing elements disposed on the at least two guiding arms to measure motion of the at least two guiding arms relative to the substrate, and a proof mass system comprising at least one mass coupled to each of the at least two guiding arms by a set of springs. The proof mass system is disposed outside the anchor region, the at least one support arm, the at least two guiding arms, the set of springs, and the plurality of sensing elements.