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    TWO FREQUENCY GYROSCOPE COMPENSATION SYSTEM AND METHOD
    4.
    发明公开
    TWO FREQUENCY GYROSCOPE COMPENSATION SYSTEM AND METHOD 审中-公开

    公开(公告)号：EP3387379A1

    公开(公告)日：2018-10-17

    申请号：EP16813250.4

    申请日：2016-12-09

    申请人： InvenSense, Inc.

    发明人： CORONATO, Luca ,  GAFFORELLI, Giacomo ,  RUOHIO, Jaakko

    IPC分类号： G01C19/5762 ,  G01C25/00

    摘要： A gyroscope is driven at a drive frequency and senses a Coriolis force caused by rotation of the gyroscope. The response of the gyroscope to a given Coriolis force may change due to changes in the gyroscope over time. A plurality of test frequencies are applied to the gyroscope, and the response of the gyroscope to those test frequencies is analyzed in order to track changes in the response of the gyroscope. Operational parameters of the gyroscope may be altered in order to compensate for those changes.

    IDENTIFICATION AND COMPENSATION OF MEMS ACCELEROMETER ERRORS
    5.
    发明公开
    IDENTIFICATION AND COMPENSATION OF MEMS ACCELEROMETER ERRORS 审中-公开

    公开(公告)号：EP3391062A1

    公开(公告)日：2018-10-24

    申请号：EP16813140.7

    申请日：2016-12-09

    申请人： InvenSense, Inc.

    发明人： GAFFORELLI, Giacomo ,  CORONATO, Luca ,  GIAMBASTIANI, Adolfo ,  MAZZARELLA, Federico ,  MUSAZZI, Massimiliano ,  FOLZ, Michele

    IPC分类号： G01P15/125 ,  G01P21/00

    CPC分类号： G01P21/00 ,  G01P15/125

    摘要： A microelectromechanical (MEMS) accelerometer has a proof mass, a sense electrode, and an auxiliary electrode. The sense electrode is located relative to the proof mass such that a capacitance formed by the sense electrode and the proof mass changes in response to a linear acceleration along a sense axis of the accelerometer. The auxiliary electrode is located relative to the proof mass such that a capacitance formed by the auxiliary electrode and proof mass is static in response to the linear acceleration. A sense drive signal is applied at the sense electrode and an auxiliary drive signal is applied at the auxiliary electrode. The sense drive signal and the auxiliary drive signal have difference frequencies. A portion of a sensed signal at the sense drive frequency is used to determine linear acceleration while a portion of the sensed signal at the auxiliary drive frequency is used to identify damage within a sense path from the proof mass.