Composition for film formation and material for insulating film formation
    6.
    发明公开
    Composition for film formation and material for insulating film formation 有权
    Beschichtungszusammensetzungfürdie Filmherstellung und Materialfürisolierenden Schichten

    公开(公告)号:EP1058274A1

    公开(公告)日:2000-12-06

    申请号:EP00111678.9

    申请日:2000-05-31

    申请人: JSR Corporation

    IPC分类号: H01B3/46 H01L21/312

    CPC分类号: H01B3/46

    摘要: A composition for film formation which is useful as an interlayer insulating film material in the production of semiconductor devices and the like, and gives a coating film having excellent uniformity, low dielectric constant, low leakage current and excellent storage stability; and a material for insulating film formation using the composition.
    The composition comprises

    (A) a product of hydrolysis and condensation obtained by hydrolyzing and condensing at least one compound selected from the group consisting of

    (A-1) compounds represented by the formula (1): R 1 a Si(OR 2 ) 4-a , and
    (A-2) compounds represented by the formula (2): R 3 b (R 4 O) 3-b Si-(R 7 ) d -Si(OR 5 ) 3-c R 6 c ; and

    (B) a compound represented by the formula (3): R 8 O(CHCH 3 CH 2 O) e R 9 .

    摘要翻译: 在半导体装置等的制造中,作为层间绝缘膜材料有用的成膜用组合物,得到均匀性,低介电常数,低漏电流,优异的保存稳定性的涂膜, 以及使用该组合物来形成绝缘膜的材料。 组合物包含(A)通过水解和缩合选自由式(1)表示的(A-1)化合物的至少一种化合物获得的水解和缩合产物:R 1 aSi(OR 2 (2)表示的(A-2)化合物:R 3 b(R 4 O)3-bSi-(R 7)d-Si(OR 5) >)3-CR <6> C。; 和(B)由式(3)表示的化合物:R 8 O(CHCH 3 CH 2 O)e R 9。

    Polyarylene copolymers and proton-conductive membrane
    8.
    发明公开
    Polyarylene copolymers and proton-conductive membrane 有权
    聚芳烃聚合物和质子离子膜

    公开(公告)号:EP1138712A2

    公开(公告)日:2001-10-04

    申请号:EP01107586.8

    申请日:2001-03-27

    申请人: JSR Corporation

    IPC分类号: C08G61/12

    CPC分类号: C08G61/12 C07C45/46 C07C49/84

    摘要: A polyarylene copolymer which comprises (A) from 60 to 3 mol% aromatic compound units having a main chain containing one or more electron-withdrawing groups therein and (B) from 40 to 97 mol% aromatic compound units having a main chain containing no electron-withdrawing groups therein (provided that (A)+(B) = 100 mol%), and a proton-conductive membrane comprising the polyarylene copolymer having sulfonic acid groups.

    摘要翻译: 一种聚亚芳基共聚物,其包含(A)60〜3摩尔%的含有一个或多个吸电子基团的主链的芳香族化合物单元和(B)40〜97摩尔%的不含电子的主链的芳香族化合物单元 (A)+(B)= 100摩尔%)和包含具有磺酸基的聚亚芳基共聚物的质子传导性膜。