公开(公告)号：EP1162646A3

公开(公告)日：2004-10-13

申请号：EP01112611.7

申请日：2001-05-23

申请人： Matsushita Electric Works, Ltd.

发明人： Yamazaki, Keiichi ,  Inooka, Yukiko ,  Sawada, Yasushi ,  Taguchi, Noriyuki ,  Nakazono, Yoshiyuki ,  Nakano, Akio

IPC分类号： H01J37/32

CPC分类号： H01J37/32357

摘要： A plasma treatment apparatus having the capability of uniformly treating an object with plasma at a high treatment speed and a plasma treatment method are provided. This apparatus comprises a tubular vessel having a laterally elongated cross section, a pair of electrodes arranged such that electric flux lines develop substantially in an axial direction of the tubular vessel when one of an AC voltage and a pulse voltage is applied between the electrodes, a gas supply for supplying a streamer generation gas into the tubular vessel, a power source for applying the voltage between the electrodes to generate plural streamers of the gas in the tubular vessel, and a plasma uniform means for making the plural streamers uniform in a lateral direction of the laterally elongated cross section of the tubular vessel to provide the plasma from one end of the tubular vessel.

公开(公告)号：EP1162646A2

公开(公告)日：2001-12-12

申请号：EP01112611.7

申请日：2001-05-23

申请人： Matsushita Electric Works, Ltd.

发明人： Yamazaki, Keiichi ,  Inooka, Yukiko ,  Sawada, Yasushi ,  Taguchi, Noriyuki ,  Nakazono, Yoshiyuki ,  Nakano, Akio

IPC分类号： H01J37/32

CPC分类号： H01J37/32357

摘要： A plasma treatment apparatus having the capability of uniformly treating an object with plasma at a high treatment speed and a plasma treatment method are provided. This apparatus comprises a tubular vessel having a laterally elongated cross section, a pair of electrodes arranged such that electric flux lines develop substantially in an axial direction of the tubular vessel when one of an AC voltage and a pulse voltage is applied between the electrodes, a gas supply for supplying a streamer generation gas into the tubular vessel, a power source for applying the voltage between the electrodes to generate plural streamers of the gas in the tubular vessel, and a plasma uniform means for making the plural streamers uniform in a lateral direction of the laterally elongated cross section of the tubular vessel to provide the plasma from one end of the tubular vessel.

摘要翻译： 提供了具有以高处理速度等离子体均匀处理物体的等离子体处理装置和等离子体处理方法。 该装置包括具有横向细长横截面的管状容器，一对电极被布置成使得当在电极之间施加AC电压和脉冲电压之一时，电流线基本上沿管状容器的轴向方向显影，a 用于向管状容器供应流光产生气体的气体供应源，用于在电极之间施加电压以在管状容器中产生多个气流的拖缆的电源;以及用于使多个拖缆沿横向均匀的等离子体均匀装置 的管状容器的横向细长横截面以从管状容器的一端提供等离子体。