摘要:
There are provided an aligning device that can reliably correct misalignment between electronic components and can increase the accuracy in aligning the electronic components, a bonding apparatus equipped with the aligning device, and an aligning method. Since an image-taking port 21 protrudes inward from an outer surface of a chamber 3 so as to define a space 11, even when the chamber 3 moves together with a second block member 28, an image recognizing device 47 can be provided in the space 11 so as to be prevented from interfering with the motion of the chamber 3. This allows the chamber 3 to freely move without any restriction. As a result, one of a first block member 12 and the second block member 28 can be freely moved relative to the other without being restricted by the placement of the image recognizing device 47, and a first wafer W1 and a second wafer W2 can be aligned reliably.
摘要:
The present invention provides a falling prevention controlling device and a computer program that, with a simple configuration, can precisely correct the inclination in a pitch direction with respect to the balanced state while securing movement in the front-back direction, without the accumulating a noise and an offset, and prevent a falling in the pitch direction. The falling prevention controlling device has a wheel, and a main body which swings in a pitch direction and a roll direction above the wheel, and has: an advance/retreat command receiving unit 42 which receives an advance or a retreat command of the wheel; a target pitch angle calculating unit 44 which calculates a target pitch angle based on the received command and a rotation velocity deviation in the pitch direction derived from the detected rotation angle; a pitch inclined angle estimating unit 47 which estimates a pitch inclined angle with respect to a balanced state, from the detected pitch angular velocity and a pitch torque command generated based an the target pitch angle; and a pitch torque command generating unit 49 which generates the pitch torque command based an the target pitch angle and the pitch inclined angle.