ALIGNING APPARATUS, BONDING APPARATUS AND ALIGNING METHOD
    1.
    发明公开
    ALIGNING APPARATUS, BONDING APPARATUS AND ALIGNING METHOD 有权
    澳大利亚人民大会堂,BONDINGVORRICHTUNG UND AUSRICHTUNGSVERFAHREN

    公开(公告)号:EP1962128A1

    公开(公告)日:2008-08-27

    申请号:EP06797390.9

    申请日:2006-09-04

    IPC分类号: G02F1/13 H01L21/68

    摘要: There are provided an aligning device that can reliably correct misalignment between electronic components and can increase the accuracy in aligning the electronic components, a bonding apparatus equipped with the aligning device, and an aligning method.
    Since an image-taking port 21 protrudes inward from an outer surface of a chamber 3 so as to define a space 11, even when the chamber 3 moves together with a second block member 28, an image recognizing device 47 can be provided in the space 11 so as to be prevented from interfering with the motion of the chamber 3. This allows the chamber 3 to freely move without any restriction. As a result, one of a first block member 12 and the second block member 28 can be freely moved relative to the other without being restricted by the placement of the image recognizing device 47, and a first wafer W1 and a second wafer W2 can be aligned reliably.

    摘要翻译: 提供了可以可靠地校正电子部件之间的未对准的对准装置,并且可以提高对准电子部件的准确性,配备有对准装置的接合装置和对准方法。 由于摄像端口21从室3的外表面向内突出以限定空间11,所以即使当室3与第二块构件28一起移动时,也可以在空间中设置图像识别装置47 以防止其与室3的运动相干扰。这允许室3自由移动而没有任何限制。 结果,第一块构件12和第二块构件28中的一个可以相对于彼此自由移动,而不受图像识别装置47的放置的限制,并且第一晶片W1和第二晶片W2可以是 可靠地对齐

    FALL PREVENTION CONTROLLER AND COMPUTER PROGRAM
    4.
    发明公开
    FALL PREVENTION CONTROLLER AND COMPUTER PROGRAM 有权
    FALLVERHINDERUNGSSTEUERGERÄTUND COMPUTERPROGRAMMDAFÜR

    公开(公告)号:EP2328055A1

    公开(公告)日:2011-06-01

    申请号:EP09814338.1

    申请日:2009-02-25

    摘要: The present invention provides a falling prevention controlling device and a computer program that, with a simple configuration, can precisely correct the inclination in a pitch direction with respect to the balanced state while securing movement in the front-back direction, without the accumulating a noise and an offset, and prevent a falling in the pitch direction. The falling prevention controlling device has a wheel, and a main body which swings in a pitch direction and a roll direction above the wheel, and has: an advance/retreat command receiving unit 42 which receives an advance or a retreat command of the wheel; a target pitch angle calculating unit 44 which calculates a target pitch angle based on the received command and a rotation velocity deviation in the pitch direction derived from the detected rotation angle; a pitch inclined angle estimating unit 47 which estimates a pitch inclined angle with respect to a balanced state, from the detected pitch angular velocity and a pitch torque command generated based an the target pitch angle; and a pitch torque command generating unit 49 which generates the pitch torque command based an the target pitch angle and the pitch inclined angle.

    摘要翻译: 本发明提供了一种防坠落控制装置和计算机程序,其具有简单的结构,能够在确保前后方向的移动的同时精确地校正相对于平衡状态的俯仰方向的倾斜,而不会累积噪声 和偏移,并且防止在俯仰方向上的下降。 防坠落控制装置具有车轮和在车轮上方的俯仰方向和滚动方向摆动的主体,具有:前进/后退指令接收单元42,其接收车轮的前进或后退命令; 目标俯仰角计算部44,根据接收到的命令计算目标俯仰角,根据检测出的旋转角度,计算俯仰方向的旋转速度偏差; 从所检测的俯仰角速度和基于目标俯仰角产生的俯仰转矩指令,推定相对于平衡状态的俯仰倾斜角的俯仰倾斜角估计部47; 以及基于目标俯仰角和俯仰倾斜角度生成俯仰扭矩指令的俯仰扭矩指令生成部49。