公开(公告)号：EP0661385A1

公开(公告)日：1995-07-05

申请号：EP92917995.0

申请日：1992-08-19

申请人： OHMI, Tadahiro

发明人： OHMI, Tadahiro ,  IMAOKA, Takashi, Department of Electronics Faculty ,  SHIMADA, Hisayuki, Depart. of Electronics Faculty ,  KONISHI, Nobuhiro, Depart. of Electronics Faculty ,  MORITA, Mizuho, Department of Electronics Faculty ,  YAMASHITA, Takeo, Depart. of Electronics Faculty ,  SHIBATA, Tadashi, Depart. of Electronics Faculty ,  WAKAMATSU, Hidetoshi, Dep. of Electronics Faculty ,  WATANABE, Jinzo, Department of Electronics Faculty ,  AOYAMA, Shintaro, Depart. of Electronics Faculty ,  NAKAMURA, Masakazu, Depart. of Electronics Faculty

IPC分类号： C23C8/10 ,  C23C16/48 ,  G01B21/30 ,  G01N23/227 ,  G21K5/00 ,  H01L21/027 ,  H01L21/263 ,  H01L21/265 ,  H01L21/304 ,  H01L21/68

CPC分类号： H01L21/02052 ,  C23C8/10 ,  C23C8/36 ,  C23C14/021 ,  C23C14/022 ,  C23C14/48 ,  C23C14/564 ,  C23C16/02 ,  C23C16/4401 ,  C30B23/02 ,  C30B25/02 ,  C30B29/16 ,  H01L21/02238 ,  H01L21/02255 ,  H01L21/31612

摘要： Vacuum processing equipment capable of preventing particles from sticking to objects to be processed in vacuum vessels. The vacuum equipment comprises a series of vacuum vessels separated by doors, and the pressures in the vessels are reducible respectively. The vessels are so configured that objects to be processed are movable among them, and there is provided light projection means for projecting ultraviolet rays on gases introduced to at least one of the vessels.

摘要翻译： 真空处理设备能够防止颗粒粘附在真空容器中被处理物体。 真空设备包括一系列由门隔开的真空容器，容器中的压力分别可减少。 容器的构造使得待处理物体在其间可移动，并且设置有用于将紫外线投射到引入到至少一个容器的气体的光投射装置。