公开(公告)号：EP2529392A1

公开(公告)日：2012-12-05

申请号：EP11778839.8

申请日：2011-10-26

Applicant: OSRAM AG

Inventor： HALFMANN, Helmut ,  HOMBACH, Axel ,  ROTH, Markus

IPC: H01J65/04 ,  H01J5/48 ,  H01J61/30

CPC classification number: A61L2/10 ,  A61L2202/23 ,  H01J5/48 ,  H01J5/56 ,  H01J61/305 ,  H01J65/046

Abstract: In various embodiments, an emitter for the irradiation of surfaces is provided. The emitter may include: an emitter vessel and an emitter base connected thereto, wherein the emitter base has at least one gas opening, which is designed for supplying a process gas into a spatial area adjacent to the emitter vessel.

公开(公告)号：EP2525837A1

公开(公告)日：2012-11-28

申请号：EP11785354.9

申请日：2011-10-26

Applicant: OSRAM AG

Inventor： HALFMANN, Helmut ,  HOMBACH, Axel ,  ROTH, Markus

IPC: A61L2/10 ,  H01J65/04 ,  H01J61/30

CPC classification number: A61L2/10 ,  A61L2202/11 ,  H01J5/52 ,  H01J61/305 ,  H01J65/046

Abstract: The invention relates to a device (1) for irradiating surfaces, having a radiating element, wherein the radiating element has at least one tunnel-like passage (3) and a means (8, 11) which is designed to allow a process gas to flow through the at least one tunnel-like passage (3). A separate gas supply device can thereby be omitted. The device can optionally also have a socket (8) of the radiating element having at least one gas opening (12) for supplying and/or discharging process gas.

Abstract translation: 在各种实施方案中，提供了一种用于照射表面的装置。 该装置可包括具有辐射发射器容器，worin辐射发射器容器中的辐射发射器具有至少一个隧道状通道; 和配置的结构，以允许工艺气体通过所述至少一个隧道状通道流动。