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    EXCIMER LIGHT IRRADIATION DEVICE
    1.
    发明公开
    EXCIMER LIGHT IRRADIATION DEVICE 审中-公开

    公开(公告)号：EP4102542A3

    公开(公告)日：2023-02-22

    申请号：EP22177475.5

    申请日：2022-06-07

    申请人： Unilam Co., Ltd.

    发明人： YOON, Joo Young ,  KIM, Eun Sik ,  JUNG, Hong Chae ,  PARK, Se Hwi ,  KIM, So Ree

    IPC分类号： H01J65/04 ,  H01J61/30 ,  F21V9/00 ,  F21V19/00

    摘要： An embodiment of the present disclosure relates to a light irradiation device, which has high light irradiation efficiency and cooling efficiency and can be reduced in size. The light irradiation device according to an embodiment of the present disclosure includes an excimer lamp 110 including a light emitting tube 111 that emits light, and a lamp electrode 112 provided on an outside of the light emitting tube, and a case 120 including a case body 121 in which the excimer lamp is accommodated, a connection support 122 provided at one side of the case body to be connected to the lamp electrode, and a case electrode 123 provided at the other side of the case body to be in contact with a surface of the light emitting tube.

    ULTRAVIOLET EXCIMER LAMP SYSTEMS AND METHODS
    2.
    发明公开
    ULTRAVIOLET EXCIMER LAMP SYSTEMS AND METHODS 审中-公开

    公开(公告)号：EP3929963A2

    公开(公告)日：2021-12-29

    申请号：EP21181109.6

    申请日：2021-06-23

    申请人： The Boeing Company

    发明人： CALLAHAN, Kevin S. ,  BROCKSCHMIDT, Arthur E.

    IPC分类号： H01J61/16 ,  A61L2/10 ,  H01J61/30 ,  H01J61/36 ,  H01J65/04

    摘要： An excimer lamp 100 includes a first electrode 110, a dielectric plate 120, and a second electrode 130. The dielectric plate has a first side 122 and a second side 124 opposite the first side. The dielectric plate is spaced a distance from the first electrode to define a volume 150 configured to hold a gas. The first side of the dielectric plate is oriented toward the first electrode. The second electrode is oriented toward the dielectric plate, wherein the dielectric plate is interposed between the first electrode and the second electrode.

    FLAT GAS DISCHARGE TUBE DEVICES AND METHODS
    3.
    发明公开
    FLAT GAS DISCHARGE TUBE DEVICES AND METHODS 审中-公开

    公开(公告)号：EP3644340A3

    公开(公告)日：2020-05-06

    申请号：EP19214078.8

    申请日：2016-03-17

    申请人： Bourns, Inc.

    发明人： HEATH, Jan ,  BOURNS, Gordan L

    IPC分类号： H01J17/26 ,  H01J61/28 ,  H01J61/30 ,  H01J61/54 ,  H01J61/92 ,  H01T1/10 ,  H01T1/20 ,  H01T4/12

    摘要： A flat gas discharge tube (GDT) device includes a first insulator substrate 102 having first and second sides and defining an opening. The GDT device further includes second and third insulator substrates 104, 106 mounted to the first and second sides of the first insulator substrate, respectively, such that inward facing surfaces of the second and third insulator substrates and the opening of the first insulator substrate define a chamber. The GDT device further includes first and second electrodes 114,116 implemented on the respective inward facing surfaces of the second and third insulator substrates, and first and second terminals 124 implemented on at least one external surface of the GDT device. The GDT device further includes electrical connections implemented between the first and second electrodes and the first and second terminals, respectively. The electrical connections include a first internal via 152 that extends through the second insulator substrate and configured to provide the electrical connection between the first electrode and the first terminal, and a second internal via 166,162 that extends through the third insulator substrate and configured to provide at least some of the electrical connection between the second electrode and the second terminal.

    ELECTRODELESS SINGLE CW LASER DRIVEN XENON LAMP
    7.
    发明公开
    ELECTRODELESS SINGLE CW LASER DRIVEN XENON LAMP 审中-公开

    公开(公告)号：EP3295470A1

    公开(公告)日：2018-03-21

    申请号：EP16724576

    申请日：2016-05-12

    申请人： EXCELITAS TECH CORP

    发明人： BLONDIA RUDI

    IPC分类号： H01J61/02 ,  H01J61/16 ,  H01J61/30 ,  H01J61/54 ,  H01J65/04

    CPC分类号： H01J61/54 ,  G03F7/70008 ,  G03F7/70016 ,  G03F7/70025 ,  G03F7/70033 ,  G03F7/7005 ,  H01J61/025 ,  H01J61/16 ,  H01J61/30 ,  H01J65/04

    摘要： An ignition facilitated electrodeless sealed high intensity illumination device is disclosed. The device is configured to receive a laser beam from a continuous wave (CW) laser light source. A sealed chamber is configured to contain an ionizable medium. The chamber has an ingress window disposed within a wall of a chamber interior surface configured to admit the laser beam into the chamber, a plasma sustaining region, and a high intensity light egress window configured to emit high intensity light from the chamber. A path of the CW laser beam from the laser light source through the ingress window to a focal region within the chamber is direct. The ingress window is configured to focus the laser beam to within a predetermined volume, and the plasma is configured to be ignited by the CW laser beam, optionally by heating of a non-electrode ignition agent located entirely within the chamber.