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1.发明公开Film bulk acoustic resonator and method for manufacturing the same 有权Filmresonator mit akustischen Volumenwellen und Verfahren zur Herstellung desselben
公开(公告)号：EP1523096A3
公开(公告)日：2005-10-12
申请号：EP04255089.7
申请日：2004-08-24
发明人： Ha, Byeoung-ju 507-1401, Samsung 5th Apt. , Park, Yun-kwon , Song, In-sang , Song, Il-jong , Kim, Jong-seok 101-202 Hyundai Apt. , Kim, Duck-hwan 601-909 Hanyang Apartment , Hwang, Jun-sik 301-1402 Hanwha Apartment
IPC分类号： H03H3/02
CPC分类号： H03H9/173 , H03H3/02 , H03H9/02133 , H03H2003/021 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49135 , Y10T29/49155
摘要： A film bulk acoustic resonator, and a method for manufacturing the same. The film bulk acoustic resonator includes a substrate, a protection layer vapor-deposited on the substrate, a membrane vapor-deposited on the protection layer and at a predetermined distance from an upper side of the substrate, and a laminated resonance part vapor-deposited on the membrane. Further, the manufacturing method includes vapor-depositing a membrane on a substrate, forming protection layers on both sides of the membrane, vapor-depositing a laminated resonance part on the membrane, and forming an air gap by removing a part of the substrate disposed between the protection layers. Accordingly, the membrane can be formed in a simple structure and without stress, and the whole manufacturing process is simplified.
摘要翻译： 一种膜体声波谐振器及其制造方法。 薄膜体声波谐振器包括基板，气相沉积在基板上的保护层，气相沉积在保护层上并距离基板的上侧预定距离的膜，以及气相沉积在 膜。 此外，制造方法包括在基板上气相沉积膜，在膜的两侧形成保护层，在膜上气相沉积层叠的共振部分，并且通过去除设置在膜之间的基板的一部分来形成气隙 保护层。 因此，膜可以以简单的结构形成并且没有应力，并且整个制造过程被简化。
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2.发明公开Film bulk acoustic resonator and method for manufacturing the same 有权Verfahren zur Herstellung einen Filmresonator mit akustischen Volumenwellen
公开(公告)号：EP1523096A2
公开(公告)日：2005-04-13
申请号：EP04255089.7
申请日：2004-08-24
发明人： Ha, Byeoung-ju 507-1401, Samsung 5th Apt. , Park, Yun-kwon , Song, In-sang , Song, Il-jong , Kim, Jong-seok 101-202 Hyundai Apt. , Kim, Duck-hwan 601-909 Hanyang Apartment , Hwang, Jun-sik 109-206, Daewon Apt.
IPC分类号： H03H3/02
CPC分类号： H03H9/173 , H03H3/02 , H03H9/02133 , H03H2003/021 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49135 , Y10T29/49155
摘要： A film bulk acoustic resonator, and a method for manufacturing the same. The film bulk acoustic resonator includes a substrate, a protection layer vapor-deposited on the substrate, a membrane vapor-deposited on the protection layer and at a predetermined distance from an upper side of the substrate, and a laminated resonance part vapor-deposited on the membrane. Further, the manufacturing method includes vapor-depositing a membrane on a substrate, forming protection layers on both sides of the membrane, vapor-depositing a laminated resonance part on the membrane, and forming an air gap by removing a part of the substrate disposed between the protection layers. Accordingly, the membrane can be formed in a simple structure and without stress, and the whole manufacturing process is simplified.
摘要翻译： 一种膜体声波谐振器及其制造方法。 薄膜体声波谐振器包括基板，气相沉积在基板上的保护层，气相沉积在保护层上并距离基板的上侧预定距离的膜，以及气相沉积在 膜。 此外，制造方法包括在基板上气相沉积膜，在膜的两侧形成保护层，在膜上气相沉积层叠的共振部分，并且通过去除设置在膜之间的基板的一部分来形成气隙 保护层。 因此，膜可以以简单的结构形成并且没有应力，并且整个制造过程被简化。
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公开(公告)号：EP1523096B1
公开(公告)日：2013-08-14
申请号：EP04255089.7
申请日：2004-08-24
发明人： Ha, Byeoung-ju 507-1401, Samsung 5th Apt. , Park, Yun-kwon , Song, In-sang , Song, Il-jong , Kim, Jong-seok 101-202 Hyundai Apt. , Kim, Duck-hwan 601-909 Hanyang Apartment , Hwang, Jun-sik 301-1402 Hanwha Apartment
CPC分类号： H03H9/173 , H03H3/02 , H03H9/02133 , H03H2003/021 , Y10T29/42 , Y10T29/49126 , Y10T29/49128 , Y10T29/4913 , Y10T29/49135 , Y10T29/49155
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