公开(公告)号：EP1558902A1

公开(公告)日：2005-08-03

申请号：EP02808047.1

申请日：2002-10-25

Applicant: Agilent Technologies Inc

Inventor： HENTSCHEL, Christian ,  THOMA, Peter

IPC: G01J4/04 ,  G01M11/00

CPC classification number: G01J4/00 ,  G01J4/04

Abstract: A first optical signal with a first polarization state is received by a polarization conversion unit. From this first optical signal, a set of n derived optical signals with n different well-defined polarization states i, i = 1, ..., n, is generated, whereby n is a natural number greater than one. Said n different well-defined polarization states are chosen such that polarization dependent measurement errors of the n derived optical signals cancel each other when averaged irrespective of the first optical signal's polarization state. Therefore, polarization dependent measurement errors can be reduced or even eliminated.

公开(公告)号：EP1397651A4

公开(公告)日：2005-06-22

申请号：EP02744424

申请日：2002-06-17

Applicant: HINDS INSTRUMENTS INC

Inventor： WANG BAOLIANG ,  OAKBERG THEODORE C

IPC: G01J4/04 ,  G01M11/00 ,  G01N21/19 ,  G01N21/23 ,  G01N21/33 ,  G03F7/20 ,  G01J4/00

CPC classification number: G03F7/7085 ,  G01J4/04 ,  G01N21/19 ,  G01N21/23 ,  G01N21/33 ,  G03F7/70966

Abstract: Provided are systems and methods for precisely measuring birefringence properties of optical elements, especially those elements that are used in deep ultraviolet (DUV) wavelengths. The system includes two photoelastic modulators (PEM) (126, 128) located on opposite sides of the sample (136). Each PEM is operable for modulating the polarity of a light beam that passes though the sample. The system also includes a polarizer (124) associated with one PEM, an analyzer (130) associated with the other PEM, and a detector (132) for measuring the intensity of the light after it passes through the PEMs, polarizer, and analyzer. Described are techniques for determining birefringence properties across a wide range. For example, a dual-wavelength source light embodiment is provided for measuring relatively high levels of birefringence. Also provided is technique for selecting the most accurate and efficient one of a number of approaches to determining birefringence properties depending upon the estimated value of the birefringence to be detected for a given sample optical element.

公开(公告)号：EP1060369A4

公开(公告)日：2005-01-19

申请号：EP99934336

申请日：1999-02-17

Applicant: HINDS INSTRUMENTS INC

Inventor： WANG BAOLIANG ,  OAKBERG THEODORE C ,  KADLEC PAUL

IPC: G01J4/04 ,  G01B9/02 ,  G01N21/23

CPC classification number: G01J4/04 ,  G01N21/23

Abstract: A practical system and method for precisely measuring low-level birefrigence properties (retardance and fast axis orientation) of optical materials (26). The system permits multiple measurements to be taken across the area of a sample to detect and graphically display (100) variations in the birefrigence properties across the sample area. In a preferred embodiment, the system incorporates a photoelastic modulator (24) for modulating polarized light that is then directed through a sample (26). The beam ('Bi') propagating from the sample is separated into two parts, with one part ('B1') having a polarization direction different than the polarization direction of the other beam part ('B2'). These separate beam parts are then processed as distinct channels. Detection mechanisms (32, 50) associated with each channel detect the time varying light intensity corresponding to each of the two parts of the beam. This information is combined for calculating a precise measure of the retardance induced by the sample, as well as the sample's fast axis orientation.

公开(公告)号：EP1345021A3

公开(公告)日：2004-03-24

申请号：EP02023225.2

申请日：2002-10-16

Applicant: Agilent Technologies, Inc.

Inventor： VanWiggeren, Gregory D.

IPC: G01M11/00 ,  G01J4/04

CPC classification number: G01M11/337 ,  G01M11/331 ,  G01M11/336

Abstract: Systems, methods, computer-readable media for determining optical characteristics, such as polarization mode dispersion and/or polarization dependent loss, of device under test (DUTs) are provided. In this regard, one such system (10) includes a response analyzer (530) that receives data corresponding to responses of a DUT (300) to optical signals. The response analyzer computes fast and slow group delays corresponding to at least some of the optical signals, each of the fast and slow group delays being attributable to one of a first and a second principle state of polarization. The response analyzer then assigns each of the fast and slow group delays to a correct one of the first and second principle states of polarization for at least some of the optical signals.

公开(公告)号：EP0880688B1

公开(公告)日：2003-08-27

申请号：EP97906438.3

申请日：1997-01-27

Applicant: Yanik, Gary W.

Inventor： Yanik, Gary W.

IPC: G01N21/21 ,  G01J4/04 ,  G01N21/05

CPC classification number: G01N21/21 ,  G01N21/05

Abstract: An improved optical rotation detector for detecting optically active molecular compounds in a sample solution using: a laser diode (12) with the beam passing through an optical fiber or lens (14) to improve its quality, a reference oscillator at frequency f (18), a first polarizer (16), a specially constructed flow cell (20) to minimize mechanical birefringence and leaking in the cell's optical windows, a second polarizer (80), and an improved detection scheme (84). The detection scheme includes a first and second photodetector for sensing first and second signals, where the first signal is light passed through the second polarizer and the second signal is light reflected off the second polarizer. A compensator circuit low pass filters the signals, inverts one signal and sums it with the other, and then notch filters off the undesired components to produce a compensated signal. The compensated signal then drives a lock-in amplifier which is driven by the reference oscillator to sense the amplitude modulated f frequency signal. This compensated signal indicates the optical activity of the sample, yet is immune to laser power fluctuations.

公开(公告)号：EP1218707A1

公开(公告)日：2002-07-03

申请号：EP00950757.5

申请日：2000-07-27

Applicant: COLORADO SCHOOL OF MINES

Inventor： FURTAK, Thomas, E.

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/04 ,  G01J3/447 ,  G01J4/00 ,  G01N21/211

Abstract: The parallel detecting spectroscopic ellipsometer/polarimeter sensor (10) has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample (22) within a processing chamber. It includes a multi-spectral source of radiation (12) for producing a collimated beam of radiation (14) directed towards the surface of the sample through a polarizer (16). The thus polarized collimated beam of radiation impacts and is reflected from the surface of the sample (22), thereby changing its polarization state due to the intrinsic material properties of the sample (22). The light reflected from the sample (22) is separated into four separate polarized filtered beams (36, 38, 58, 62), each having individual spectral intensities. Data about said four individual spectral intensities is collected within the processing chamber, and is transmitted into one or more spectrometers. The data of all four individual spectral intensities is then analyzed using transformation algorithms, in real-time.

公开(公告)号：EP1213578A1

公开(公告)日：2002-06-12

申请号：EP00126888.7

申请日：2000-12-07

Applicant: Semiconductor300 GmbH & Co KG

Inventor： Kuerner, Wolfgang, Dr.

IPC: G01N21/47 ,  G01J4/04

CPC classification number: G01N21/23 ,  G01J4/04

Abstract: The present invention relates to an apparatus and a method for detecting an amount of depolarization of a linearly polarized beam transmitted by a birefringent medium in the direction of the optical axis thereof. The apparatus comprises a first beam splitter (7) for separating an on-axis portion (2) of said linearly polarized beam into the orthogonal components (3,4), two photodetectors (8,9) for detecting each component (3,4), a second beam splitter (12) for separating an off-axis portion (11) of said linearly polarized beam into the orthogonal components (15,16), wherein said second beam splitter (12) is disposed off-axis of the incident linearly polarized beam (1), a second set of photodetectors for detecting the components (15,16) separated by said second beam splitter (12), and a subtracting device (17) for substracting the signals received by said second set of photodetectors (13,14) from the respective signals received by the first two photodetectors (8,9).

Abstract translation: 本发明涉及一种用于检测由双折射介质在其光轴方向上透射的线偏振光束的去极化量的装置和方法。 该装置包括用于将所述线偏振光束的轴上部分（2）分离为正交分量（3,4）的第一分束器（7），用于检测每个分量（3,4）的两个光电探测器（8,9） ），用于将所述线偏振光束的离轴部分（11）分离成正交分量（15,16）的第二分束器（12），其中所述第二分束器（12）设置在事件的离轴 线偏振光束（1），用于检测由所述第二分束器（12）分离的部件（15,16）的第二组光电检测器，以及用于将由所述第二组光电探测器（12）接收的信号 13,14）从由前两个光电检测器（8,9）接收的相应信号中。

公开(公告)号：EP0950881A3

公开(公告)日：2000-08-16

申请号：EP99106726.5

申请日：1999-04-01

Applicant: NanoPhotonics AG

Inventor： Abraham, Michael, Dr. ,  Depner, Oliver, Dipl.-Ing. ,  Eberhardt, Matthias, Dr.

IPC: G01J4/00 ,  G01N21/21 ,  G01J4/04

CPC classification number: G01B11/26 ,  G01J4/00

Abstract: Für die Justierung von Probe und Ellipsometer sind normalerweise wiederholte Eichmessungen erforderlich. Um eine automatische relative Justierung zu erreichen, ist dem Ellipsometer (10) ein bezüglich des Ellipsometers justierbares und verriegelbares Proben-Lage-Erkennungssystem (20) zugeordnet, das an eine auf dem Probentisch (2) und/oder auf das Gesamtsystem (43) Erkennungssystem (20)/Ellipsometer (10) eine Verstelleinrichtung (40) angeschlossen ist. Das Verfahren zur automatischen relativen Justierung sieht vor, daß zunächst anhand einer ersten Probe das System Probe Ellipsometer über die Symmetrie des Detektorsignals des Ellipsometers justiert wird und daß das Proben-Lage-Erkennungssystem bezüglich des Ellipsometers justiert und nach der Justierung mit diesem verriegelt wird. Bei allen weiteren Proben wird anhand der Signale des Erkennungssystems eine relative Ausrichtung von Probe und Ellipsometererkennungssystem durchgeführt. Insbesondere können die Messungen durchgeführt werden, ohne die Probe selbst zu bewegen, da die Justierung auch durch die alleinige Bewegung des Ellipsometer-Erkennungssystems erfolgen kann.

公开(公告)号：EP0802407A2

公开(公告)日：1997-10-22

申请号：EP97106400.1

申请日：1997-04-17

Applicant: TOYOTA JIDOSHA KABUSHIKI KAISHA ,  Toyota School Foundation

Inventor： Suzuki, Takao ,  van Drent, William

IPC: G01N21/21 ,  G01N21/17 ,  G01J4/04

CPC classification number: G01N21/21

Abstract: An apparatus for measuring magneto-optical effect includes a light source 102, a spectroscope 120, a first polarizer 150 to polarize the light with a required wavelength taken out by the spectroscope 120, means 172 for applying magnetic field on a sample 176, a second polarizer 156 to admit the light transmitted or reflected by a sample 176 to pass, a photo-detector 162 for detecting intensity of light that has passed the second polarizer 156. The light source 102 includes a heavy hydrogen lamp and the spectroscope does not contain a lens and/or prism. A light path from the light source to the photo-detector is housed in a container, and the container is filled with a gas containing no oxygen.

公开(公告)号：EP0515360A4

公开(公告)日：1993-09-15

申请号：EP90903668

申请日：1990-02-14

Applicant: THE JOHNS HOPKINS UNIVERSITY

Inventor： NEWMAN, ARNOLD, L. ,  STANBRO, WILLIAM, D.

IPC: C12M1/34 ,  C12M1/00 ,  G01J4/04 ,  G01N21/21 ,  G01N21/75

CPC classification number: G01J4/04 ,  G01N21/21 ,  G01N2021/1751 ,  G01N2021/755

Abstract: A differential polarimeter is disclosed for detecting changes in optical rotation between a test cell (10) and reference cell (12). The test cell (10) contains a fluid sample exposed to an analyte specific enzyme; the reference cell (12) contains a fluid sample not exposed to the enzyme. To enhance the sensitivity of the system a phase sensitive differential polarimetric technique is taught. In this technique, the phase difference between two resulting sinewave voltages is a measure of analyte concentration.