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111.发明公开Transparent substrate with monomolecular film thereon and method of manufacturing the same 失效透明度Substrat mit aufgebrachtem monomolekularem Film und Verfahren zu seiner Herstellung。
公开(公告)号：EP0492545A2
公开(公告)日：1992-07-01
申请号：EP91122017.6
申请日：1991-12-20
发明人： Ogawa, Kazufumi , Mino, Norihisa , Soga, Mamoru
CPC分类号： B82Y30/00 , B05D1/185 , B82Y40/00 , C03C17/30 , C03C2217/76
摘要： At least one monomolecule film is formed on a transparent substrate surface (11) directly or via a protective film. The monomolecule film (12) is formed with chemical coupling of haliole-based silane or alkoxy silane-based surface active compound, for example, of the formula:
F(CF₂) m (CH₂) n SiR q X 3- q
where m is an integer of from 1 to 15, n is an integer of from 0 to 15 provided that the total of m and n is an integer of from 10 to 30 and R is an alkyl or an alkoxyl group, or
F(CF₂) m' (CH₂) n' A(CH₂) p SiR q X 3-q
where m' represents an integer ranging from 1 to 8, n' represents an integer ranging from 0 to 2, p represents an integer ranging from 5 to 25, q represents an integer ranging from 0 to 2, X represents a halogen atom or an alkoxyl group, R represents an alkyl or an alkoxyl group, and A represents -O-, -COO- or -Si(CH₃)₂-. The transparent substrate (11) such as glass is made hydrophobic and free of contamination.摘要翻译： 至少一个单分子膜直接或通过保护膜形成在透明基板表面上。 单分子膜由氯硅烷表面活性化合物的化学偶合形成，例如下式：F（CF 2）m（CH 2）n SiR q X 3-q，其中m为1至15的整数，n为0的整数 至15的整数，条件是m和n的总数为10-30的整数，R是烷基或烷氧基，或F（CF 2）m'（CH 2）n'A（CH 2）p SiR q X 3-q其中m' 表示1〜8的整数，n'表示0〜2的整数，p表示5〜25的整数，q表示0〜2的整数，X表示卤素原子或烷氧基， R表示烷基或烷氧基，A表示-O-，-COO-或-Si（CH3）2-。 透明基板如玻璃被制成疏水性并且没有污染。
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112.发明公开Chemically adsorbed monomolecular lamination film and method of manufacturing the same 失效Durch chemische吸附层压机单功能胶片和Verfahren zu seiner Herstellung。
公开(公告)号：EP0484746A2
公开(公告)日：1992-05-13
申请号：EP91118094.1
申请日：1991-10-23
发明人： Ogawa, Kazufumi , Mino, Norihisa , Soga, Mamoru
IPC分类号： C08J7/00 , B32B27/00 , B05D1/00 , C09D183/08
CPC分类号： C04B41/52 , B05D1/185 , B82Y5/00 , B82Y30/00 , B82Y40/00 , C04B41/009 , C04B41/89 , C04B2111/00965 , C08J7/047 , C08J2483/00 , C09D4/00 , C09D183/08 , Y10T428/261 , Y10T428/31612 , Y10T428/31663 , Y10T428/31667 , C04B41/4933 , C04B41/524 , C04B33/00 , C04B33/24 , C08G77/24
摘要： The invention to provide a chemically adsorbed monomolecular lamination film comprising a chemically adsorbed monomolecular film formed via a siloxane-based monomolecular or polymer film on a substrate surface. It also seeks to provide a method of forming a chemically adsorbed monomolecular film efficiently and with high density on a substrate surface with few hydroxyl groups, which method comprises a step of contacting a substrate containing hydroxyl groups present on the surface with a non-aqueous solution containing a material with plural chlorosilanol groups in molecule, a step of removing the material remaining on the substrate without reaction by washing the substrate with a non-aqueous organic solution (if this process is omitted, the siloxane-based polymer film is prepared on the substrate), a step of forming a monomolecular film constituted by a compound containing a silanol group in molecule on the substrate by exposing to the air containing moisture or washing with water, after the removal step, and a step of laminating a monomolecular adsorption film by adosorbing a chlorosilane-based surface active agent constituted by a straight hydrocarbon chain having a chlorosilane groups at one end onto the substrate after the monomolecular or polymer film formation step.
摘要翻译： 本发明提供一种化学吸附的单分子层叠膜，其包含在基材表面上通过基于硅氧烷的单分子或聚合物膜形成的化学吸附的单分子膜。 它还寻求提供一种在几乎没有羟基的基板表面上有效且高密度地形成化学吸附的单分子膜的方法，该方法包括使表面存在的羟基的基材与非水溶液接触的步骤 含有分子中具有多个氯硅烷醇基团的材料，通过用非水有机溶液洗涤基材而除去残留在基材上的材料而不反应的步骤（如果省略该方法，则将硅氧烷基聚合物膜制备在 底物），在除去步骤之后，通过暴露于含有水分的空气或用水洗涤，在分子中分子内含有硅烷醇基的化合物构成的单分子膜的步骤，以及将单分子吸附膜层叠 将由具有氯代硅烷基团的直链烃链构成的氯硅烷基表面活性剂掺杂 在单分子或聚合物膜形成步骤之后的一端到基底上。
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113.发明公开A fluorocarbon-based coating film and method of manufacturing the same 失效Beschichtungsfilm auf der Basis von Fluorkohlenwasserstoffpolymeren und Verfahren zur Herstellung。
公开(公告)号：EP0482613A1
公开(公告)日：1992-04-29
申请号：EP91118078.4
申请日：1991-10-23
发明人： Ogawa, Kazufumi , Soga, Mamoru
IPC分类号： B05D1/20 , C09D127/12
CPC分类号： C08J7/123 , B05D1/185 , B82Y30/00 , B82Y40/00 , C03C17/3405 , C03C17/42 , C09D4/00 , C09D183/04 , Y10T428/252 , Y10T428/31504 , Y10T428/3154 , Y10T428/31544 , Y10T428/31623 , Y10T428/31663 , Y10T428/31678 , C08G77/04
摘要： Disclosed is a step of contacting a substrate having a surface containing hydroxyl groups with a non-aqueous solution containing a material having a chrolosilyl group, a step of coating the substrate with a non-aqueous solvent containing a compound having a fluorocarbon group and a chlorosilane group or a solvent containing a compound containing a fluorocarbon group and an alkoxysilane and a step of baking the substrate after the contacting and coating steps a fluorocarbon-based polymer coating film chemically bonded to the substrate surface can be obtained. Wherein the hydroxyl groups on the substrate surface and chlorosilyl groups of the material having a chrolosilyl group are reacted to form a thin film having a large number of silanol groups (-SiOH) capable of connecting the polymer coating film to the substrate.
摘要翻译： 公开了将含有羟基的表面的基材与含有具有氯仿基团的材料的非水溶液接触的步骤，用含有碳氟化合物的化合物和氯硅烷的非水溶剂涂布基材的工序 基团或含有含氟碳基和烷氧基硅烷的化合物的溶剂，以及在接触涂布步骤之后烘焙基板的步骤，可以获得化学键合到基板表面的氟碳基聚合物涂膜。 其中基底表面上的羟基和具有氯菌啉基的物质的氯甲硅烷基反应形成具有大量能够将聚合物涂膜连接到基底上的硅烷醇基（-SiOH）的薄膜。
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114.发明公开Organic device and method for producing the same 失效Organistches Bauelement und dessen Herstellungsverfahren。
公开(公告)号：EP0469243A1
公开(公告)日：1992-02-05
申请号：EP91106785.8
申请日：1991-04-26
发明人： Ogawa, Kazufumi , Mino, Norihisa
IPC分类号： H01L29/28
CPC分类号： H01L51/0075 , H01L51/0036 , H01L51/0062 , H01L51/0094 , H01L51/0545 , Y10S428/901 , Y10T428/24917
摘要： 5 n7 The present invention provides an organic device comprising a substrate having a polymerized monomolecular or built-up multi-monomolecular film, a first electrode, a second electrode with said film intervening between the electrodes, a third electrode connected directly or indirectly to the monomolecular or built-up multi-monomolecular film, which device is operated by applying a voltage between the third electrode and the second electrode to control an electric current flowing between the first electrode and the second electrode through said polymerized monomolecular or built-up multi-monomolecular film between the electrodes. If the polymerization of the monomolecular film is eliminated, the device can be imparted with learning functions because the polymerization of the film proceeds depending upon an amount of electricity flowing during the use of the device. Since the present invention makes use of electroconductive groups in the monomolecular or built-up multi-monomolecular film, there can be produced such devices with organic materials as being independent of crystallinity even when any fine processing is performed for further increasing the high packing density of the devices.
摘要翻译： 本发明提供了一种有机器件，其包括具有聚合的单分子或聚合多单分子膜的基底，第一电极，具有介于电极之间的所述膜的第二电极，直接或间接连接到单分子或构建的第三电极 该多单分子膜通过在第三电极和第二电极之间施加电压来操作，以通过所述聚合的单分子或多层多分子膜在第一电极和第二电极之间流动的电流来控制 电极。 如果消除单分子膜的聚合，则可以赋予该装置学习功能，因为膜的聚合取决于在使用该装置期间的电流量而进行。 由于本发明在单分子或多层单分子膜中使用导电基团，因此即使进行任何精细加工以进一步提高高填充密度，也可以生产这样的具有与结晶性无关的有机材料的装置 设备。
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115.发明公开A process for preparing an organic monomolecular film 失效韦尔法罕zur Herstellung eines organischen monomolekularenÜberzuges。
公开(公告)号：EP0445534A1
公开(公告)日：1991-09-11
申请号：EP91101532.9
申请日：1991-02-05
发明人： Ogawa, Kazufumi , Mino, Norihisa
摘要： A monomolecular polymer film or a lamination of monomolecular polymer films having polyacetylenic, polydiacetylenic, or polyacenic bonds is provided. The film or the lamination is prepared by the use of a chemical adsorbent having at least one triple bond, and a -SiCI group at one molecular end. The chemical adsorbent is adsorbed on a base plate and the polymerization is carried out by the predetermined method. particularly, a highly oriented polymerized monomolecular film or a lamination is prepared by the use of e.g., the STM writing technique or the rubbing process.
摘要翻译： 提供单分子聚合物膜或具有聚乙炔，聚二乙炔或多烯键的单分子聚合物膜的叠层。 通过使用具有至少一个三键的化学吸附剂和一个分子末端的-SiCl基团制备膜或层压。 化学吸附剂吸附在基板上，通过预定方法进行聚合。 特别地，通过使用例如STM写入技术或摩擦处理来制备高取向聚合单分子膜或层压。
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公开(公告)号：EP0344799A3
公开(公告)日：1991-04-10
申请号：EP89110030.7
申请日：1989-06-02
发明人： Ogawa, Kazufumi
CPC分类号： B01D67/0093 , B01D69/122 , B01D69/125 , B05D1/185 , B05D1/202 , B82Y30/00 , B82Y40/00 , C08J7/047 , C08J2301/00
摘要： A selectively permeable film comprising a porous hydrophilic substrate and the monolayer or multilayer of a polymer obtained by polymerizing a compound having a polymerizable group and another functional group by a catalyst or an irradiation with an energy beam, and a process for producing the same. The selectively permeable film of the present invention can be used as an oxygen-enriching film excellent in selective permeability and efficiency of the permeability.
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公开(公告)号：EP0282201A3
公开(公告)日：1991-04-10
申请号：EP88301564.6
申请日：1988-02-24
发明人： Ogawa, Kazufumi , Mino, Norihisa
CPC分类号： G03F7/2053 , G03F7/091 , G03F7/105 , G03F7/2022
摘要： Disclosed is a pattern forming method wherein (i) an organic thin film is formed on a semiconductor substrate, (ii) this organic thin film is selectively exposed with a first deep UV light (excimer layer light of 248 nm) to degenerate only the vicinity of the surface of the organic thin film (where the degenerated part possesses the property for absorbing the wavelength of the light of second exposure), (iii) the entire surface of the organic film is irradiated with a light having a waveform with excellent transmissivity of the organic thin film (e.g. g-ray of 436 nm), and (iv) the organic thin film is developed and removed except for the part degenerated by the first exposure, thereby forming a pattern. According to this method, fine processing in fabrication of semiconductor device of the like can be effected easily, and, still more, a superfine pattern (e.g. 0.5 µm or less) can be presented.
摘要翻译： 公开了一种图案形成方法，其中（i）在半导体衬底上形成有机薄膜，（ii）用第一深紫外光（248nm的准分子层光）选择性地暴露该有机薄膜，使其仅仅附近 的有机薄膜的表面（其中退火部分具有吸收第二次曝光的光的波长的性质），（iii）用具有优异的透射率的波形的光照射有机薄膜的整个表面 有机薄膜（例如，436nm的g射线），和（iv）有机薄膜除了通过第一次曝光退化的部分之外，被除去，从而形成图案。 根据该方法，能够容易地实现半导体装置的制造的精细加工，更进一步可以呈现超细图案（例如0.5μm以下）。
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公开(公告)号：EP0386784A3
公开(公告)日：1990-12-19
申请号：EP90104533.6
申请日：1990-03-09
发明人： Ogawa, Kazufumi
CPC分类号： B01D67/0093 , B01D69/122 , B01D69/125 , B05D1/185 , B05D1/202 , B82Y30/00 , B82Y40/00 , C08J7/047 , C08J2301/00
摘要： There are disclosed a permselective membrane in a state of monomolecular polymer film obtained by subjecting a monomolecular film of a substance having at least one polymerizable group and a functional group to polymerization, and a process for producing said permselective membrane. Said membrane is useful as a permselective membrane for gases, liquids, etc.
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119.发明公开Process for producing polyacetylene or polyacene type super long conjugated polymers 失效生产聚乙烯或聚丙烯型超长连接聚合物的方法
公开(公告)号：EP0339677A3
公开(公告)日：1990-10-10
申请号：EP89107790.1
申请日：1989-04-28
发明人： Ogawa, Kazufumi
CPC分类号： B82Y30/00 , B05D1/185 , B05D1/202 , B82Y10/00 , B82Y20/00 , B82Y40/00 , G02F1/3618 , H01B1/125
摘要： This invention relates to production of a super long conjugated polymer to be used for a molecular device, etc. According to this invention, an acetylene derivative is previously oriented and formed into a monomolecular film on the surface of a substrate and its acetylenic group is polymerized by a catalyst or by irradiation of an energy beam while keeping the orientation. Since the respective molecules are oriented and aligned on the substrate surface, the polymerization reaction readily proceeds, and after the polymerization the resulting polyacetylene molecules are prevented from the breakage of conjugated bonds caused by thermal agitation or twisting of the polyacetylene molecules. Accordingly, a polyacetylene or polyacene type polymer having super long conjugated bonds can be obtained easily.
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公开(公告)号：EP0284414A3
公开(公告)日：1990-10-10
申请号：EP88302671.8
申请日：1988-03-25
CPC分类号： G03F7/70241 , G02B1/02 , G02B13/143 , G02B13/24
摘要： An exposure apparatus for manufacturing semiconductor devices in which quartz based lenses are used. The lenses are made of two or more different types of glass materials, i.e., only quartz or a mixture of quartz and an impurity which is fluorine which can control refractive index to a particular wavelength of the lens in accordance with its mixing amount. Chromic aberration correction type reduction projection lenses for an excimer laser beam can be realized by use of glass material of synthesized quartz or synthesized quartz with fluorine as an impurity.
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