公开(公告)号：EP2283401B1

公开(公告)日：2015-03-04

申请号：EP08874227.5

申请日：2008-11-20

Applicant: J.A. WOOLLAM CO. INC.

Inventor： HE, Ping ,  HALE, Jeffrey, S. ,  PFEIFFER, Galen, L. ,  LIPHARDT, Martin, M.

IPC: G01N21/21 ,  G01J4/00

CPC classification number: G01N21/211 ,  G01J4/00 ,  G01N2021/213

公开(公告)号：EP2715422A2

公开(公告)日：2014-04-09

申请号：EP12789675.1

申请日：2012-05-21

Applicant: Luna Innovations Incorporated

Inventor： SANBORN, Eric, E. ,  FROGGATT, Mark, E.

IPC: G02B6/126

CPC classification number: G02B27/283 ,  G01J4/00 ,  G02B6/2706

Abstract: An apparatus for separating polarization of light includes a rotatable beam splitter including an input for receiving light with a first polarization and an output for outputting light with a second polarization different from the first polarization. Rotation of the rotatable beam splitter changes the first polarization of the input light to the second polarization of the output light. An optical network and method are also set forth.

公开(公告)号：EP2713142A1

公开(公告)日：2014-04-02

申请号：EP12186630.5

申请日：2012-09-28

Applicant: SICK STEGMANN GmbH

Inventor： Hopp, David

IPC: G01D5/34

CPC classification number: G01B11/14 ,  G01D5/345 ,  G01J4/00

Abstract: Die Erfindung betrifft eine Vorrichtung zur Messung der relativen Position zweier relativ zueinander entlang einer Achse oder um eine Drehachse (D) bewegbarer Objekte mit einem Sender (12), der unpolarisiertes Licht aussendet, mit einem Polarisator (20), und mit wenigstens einem Empfänger (16), der die durch den Polarisator (20) durchtretende Lichtintensität misst, um ein positionsabhängiges Signal zu erzeugen, wobei vor dem Empfänger (16) ein Polarisationsfilter angeordnet ist und wobei sich der Empfänger (16) und der Polarisator (20) in Abhängigkeit von der relativen Position der beiden Objekte relativ zueinander bewegen, wobei der Polarisator (20) wenigstens zwei verschiedene Polarisationsrichtungen aufweist.

Abstract translation: 该装置具有用于提供非偏振光的发射器和设计成圆盘的偏振器（20）。 接收器测量通过偏振器的光的亮度，用于产生位置相关信号。 偏振滤光器位于接收器的前面，其中接收器和偏振器基于两个物体的相对位置相对于彼此移动。 偏振器具有两个不同的偏振方向，其中发射器的光轴平行于物体的旋转轴线（D）布置。 发射机被设计为非偏振光源，即LED。

公开(公告)号：EP2306166A3

公开(公告)日：2013-07-10

申请号：EP10007509.2

申请日：2010-07-20

Applicant: Korea Research Institute of Standards and Science

Inventor： Cho, Yong Jai ,  Chegal, Won ,  Cho, Hyon Mo

IPC: G01J11/00 ,  G01J1/42 ,  G01N21/21 ,  G01J4/00

CPC classification number: G01J1/42 ,  G01J4/00 ,  G01N21/211

Abstract: Provided is present invention a measurement method of Fourier coefficients using an integrating photometric detector, wherein, when measuring an exposure (S j ) with a predetermined time interval during a predetermined time period using an integrating photometric detector with respect to light of which amplitude varies with the time period, normalized Fourier coefficients (α' 2n , β' 2n ) for a waveform of an intensity of the light is determined by carrying out a discrete Fourier transform with respect to an equation for the measured exposure (S j ).

公开(公告)号：EP2596325A1

公开(公告)日：2013-05-29

申请号：EP11754441.1

申请日：2011-07-18

Applicant: Horiba Jobin Yvon S.A.S.

Inventor： ACHER, Olivier

IPC: G01J4/00 ,  G02B21/00

CPC classification number: G01J4/04 ,  G01J4/00 ,  G02B21/0092

Abstract: The present invention relates to a polarimetric measurement device with microscopic resolution, in particular comprising polarization conversion means able to modify the polarization of a beam so as to switch from a spatially uniform distribution to a distribution that is cylindrically symmetric about the optical axis, and vice versa, said conversion means being placed on the axis of a focusing objective (7) for focusing said cylindrically symmetric polarized beam onto the surface of a sample to be measured. The invention also relates to a microellipsometer, to an interference contrast microscope, to a polarimetric accessory for a microscope and to a polarimetric measurement method.

公开(公告)号：EP2405245A3

公开(公告)日：2013-04-17

申请号：EP11173305.1

申请日：2011-07-08

Applicant: OFS Fitel, LLC

Inventor： Mikhailo, Vitaly ,  Westbrook, Paul S.

IPC: G01J4/00 ,  G01J4/04

CPC classification number: G01J4/00 ,  G01J4/04

Abstract: A procedure for self-calibration of an optical polarimeter has been developed that eliminates the need for "known" input signals to be used. The self-calibration data is taken by moving a polarization controller between several random and unknown states of polarization (SOPs) and recording the detector output values (D 0 , ..., D 3 ) for each state of polarization. These values are then used to create an "approximate" calibration matrix. In one exemplary embodiment, the SOP of the incoming signal is adjusted three times (by adjusting a separate polarization controller element, for example), creating a set of four detector output values for each of the four polarizations states of the incoming signal - an initial calibration matrix. The first row of this initial calibration matrix is then adjusted to fit the power measurements using a least squares fit. In the third and final step, the remaining elements of the calibration matrix are adjusted to a given constraint (for example, DOP=100% for all SOPs).

公开(公告)号：EP2283401A1

公开(公告)日：2011-02-16

申请号：EP08874227.5

申请日：2008-11-20

Applicant: J.A. WOOLLAM CO. INC.

Inventor： HE, Ping ,  HALE, Jeffrey, S. ,  PFEIFFER, Galen, L. ,  LIPHARDT, Martin, M.

IPC: G05B19/04

CPC classification number: G01N21/211 ,  G01J4/00 ,  G01N2021/213

Abstract: A sample investigation system (ES) in functional combination with an alignment systen (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of -incidence adjustments, with application in mapping ellipsometer or the like systems.

公开(公告)号：EP2269101A1

公开(公告)日：2011-01-05

申请号：EP08859799.2

申请日：2008-12-10

Applicant: Research Foundation Of The City University Of New York

Inventor： CROUSE, David, Thomas ,  KESHAVAREDDY, Pavan Kumar Reddy

IPC: G02B5/30

CPC classification number: G02B5/3058 ,  B82Y20/00 ,  G01J4/00 ,  G01J2004/001 ,  G02B5/008 ,  G02B5/1809 ,  H01L31/054

Abstract: A device for enhancing transmission of incident electromagnetic radiation at a predetermined wavelength is presented that includes an aperture array structure in a thin film. The structure includes a repealing unit cell having more than one aperture including a first aperture and a second aperture, wherein a parameter of the first aperture differs from that of the second aperture. The unit cell repeats with a periodicity on the order of or less than said predetermined wavelength, The structure parameters are configured to preferentially support cavity modes for coupling to and enhancing transmission of a predetermined polarization state at the predetermined wavelength. By structuring the unit cell with apertures that differ by appropriate degrees in at least one of dimension, height, dielectric constant of material filling the apertures, shape, and orientation, the devices can be adapted for polarization and/or wavelength filtering- and/or light circulating, weaving, or channeling.

公开(公告)号：EP2132556A2

公开(公告)日：2009-12-16

申请号：EP08776261.3

申请日：2008-03-25

Applicant: Universite De Strasbourg (Etablissement Public à Caractère Scientifique, Culturel et Professionel) ,  Centre National de la Recherche Scientifique ,  Forsvarets Forskningsinstitutt

Inventor： EBBESEN, Thomas ,  SKAULI, Torbjorn

IPC: G01N21/55 ,  G02B6/122 ,  G02B5/18 ,  G03F1/00 ,  G02B27/00 ,  G03F7/00

CPC classification number: G02B5/008 ,  B82Y20/00 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0224 ,  G01J3/0256 ,  G01J3/18 ,  G01J4/00 ,  G01N21/21 ,  G01N21/554 ,  G02B6/1226 ,  G02B6/32

Abstract: The present invention concerns a device for sorting and concentrating electromagnetic energy impinging a surface of said device, said surface comprising at least one plasmonics-based surface structure or similar structure of periodic or quasi-periodic surface topography. Device characterised in that said surface (V) is provided with at least two such surface structures (2), acting as individual concentrator structures, which are at least partially spatially overlapped or superposed.

公开(公告)号：EP1376100B1

公开(公告)日：2006-04-05

申请号：EP02291510.2

申请日：2002-06-17

Applicant: Horiba Jobin Yvon S.A.S.

Inventor： Amary, Pascal ,  Benferhat, Ramdane ,  Bos, Francis ,  Cattelan, Denis

IPC: G01N21/21

CPC classification number: G01J4/00 ,  G01N21/211 ,  G01N2021/213 ,  G01N2021/214