公开(公告)号：EP2803752A1

公开(公告)日：2014-11-19

申请号：EP13735785.1

申请日：2013-01-10

申请人： Nakayama Amorphous Co., Ltd.

发明人： KURAHASHI Ryurou ,  MATSUMOTO Hiroshi ,  TAKEHARA Junji ,  FUKUTOME Yoshihisa

IPC分类号： C23C4/12 ,  B05B7/20

CPC分类号： C23C4/124 ,  B05B7/08 ,  B05B7/1486 ,  B05B7/1606 ,  B05B7/205 ,  C23C4/06 ,  C23C4/08 ,  C23C4/129

摘要： PROBLEM: To provide a large device and a method which is advantageous for forming a large-area amorphous film.
SOLUTION: A device of the invention sprays a flame including a particulate material with a spraying machine toward a substrate, melts the material with the flame, and cools the material and flame by cooling gas before they reach the substrate to form an amorphous film. The spraying machine has particulate material spraying ports and flame spraying ports such that the flame including the material has an oblong cross section. Inert gas spraying ports are successively placed on both sides across the ports of the material and flame. Mist spraying ports are successively placed on both sides across the ports for the material, flame and inert gas. A skirt is attached/detached depending on a combustion gas or a film width to restrain film width narrowing and increase of film thickness deviation.

摘要翻译： 问题：提供一种有利于形成大面积非晶膜的大型器件和方法。 解决方案：本发明的装置通过喷涂机向衬底喷射包括颗粒材料的火焰，用火焰熔化材料，并在冷却气体到达衬底之前冷却材料和火焰以形成非晶膜。 喷涂机具有颗粒材料喷射口和火焰喷射口，使得包括材料的火焰具有长方形横截面。 惰性气体喷射口连续放置在材料和火焰的两端。 喷雾口连续放置在两端，用于材料，火焰和惰性气体。 根据燃烧气体或薄膜宽度来连接/分离裙部，以抑制膜宽度变窄和膜厚度偏差增加。