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公开(公告)号:EP2063986A1
公开(公告)日:2009-06-03
申请号:EP07803560.7
申请日:2007-09-20
IPC分类号: B01L3/00
CPC分类号: B01L3/502707 , B01L2200/10 , B01L2200/12 , B01L2300/0627 , B01L2300/0645 , B01L2300/0887 , B01L2300/1827 , B01L2400/0427 , H01L2224/48091 , H01L2224/8592 , H01L2924/1461 , H01L2924/00014 , H01L2924/00
摘要: The invention relates to a fluid component characterised in that it includes: - at least one substrate (32) of a material that can be etched and an etch stop layer (34) for said material; - means (38) for detecting the properties of a fluid and/or for activating said fluid and provided on a first side of said etch stop layer; - and means (40) for receiving said fluid, formed in the substrate and provided on the second side of the etch stop layer.