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18 条记录 (耗时 0.012 秒)

    Method of cutting grooves in hydrodynamic bearing made of ceramic material
    12.
    发明公开
    Method of cutting grooves in hydrodynamic bearing made of ceramic material 失效
    韦尔法罕zum Schneiden von Rillen在ein hydrodynamisches Lager aus keramischem Werkstoff。

    公开(公告)号：EP0488402A2

    公开(公告)日：1992-06-03

    申请号：EP91120588.8

    申请日：1991-11-29

    申请人： EBARA CORPORATION

    发明人： Noda, Yumiko ,  Kamiya, Ichiro ,  Toshimitsu, Manabu ,  Sato, Yoshio ,  Shinjo, Ryoichi

    IPC分类号： B23K26/00 ,  F16C33/10 ,  F16C33/04

    CPC分类号： F16C33/107 ,  B23K26/364 ,  B23K26/40 ,  B23K2203/52 ,  F16C17/045 ,  F16C33/043

    摘要： A ceramic hydrodynamic bearing used as a radial or a thrust bearing in a spindle motor for a hard disk driver. The bearing includes a ceramic bearing base having hydrodynamic pressure generating grooves. A sliding surface of the bearing base is irradiated with an energy beam with a high energy density to remove said material, thereby forming hydrodynamic pressure generating groove, and at the same time the grooves are coated with a modification layer that is formed by melting the ceramic material that constitutes said ceramic bearing base with the energy beam and by solidifying said ceramic bearing base.

    摘要翻译： 陶瓷流体动力轴承用作用于硬盘驱动器的主轴电机中的径向或推力轴承。 轴承包括具有流体动力学压力产生槽的陶瓷轴承座。 用高能量密度的能量束照射轴承座的滑动表面以去除所述材料，从而形成流体动力学压力产生槽，同时，凹槽涂覆有通过熔化陶瓷形成的改性层 用能量束构成所述陶瓷轴承座的材料，并且固化所述陶瓷轴承座。

    Ozonizer
    15.
    发明公开
    Ozonizer 失效

    公开(公告)号：EP0698576A3

    公开(公告)日：1996-05-01

    申请号：EP95113336.2

    申请日：1995-08-24

    申请人： EBARA CORPORATION ,  KABUSHIKI KAISHA TOSHIBA

    发明人： Harada, Minoru ,  Shinjo, Ryoichi ,  Tsujimura, Manabu ,  Nakata, Rempei ,  Miyazaki, Kunihiro ,  Kaji, Naruhiko

    IPC分类号： C01B13/11

    CPC分类号： C01B13/11

    摘要： In an improved ozonizer, at least those parts of an ozone gas delivery path located downstream of an ozone generating cell which are to come into contact with ozone gas are either composed of or coated with at least one ozone-resistant, Cr-free material selected from among aluminum (Al), an aluminum alloy, Teflon, fluorinated nickel, a nickel alloy, a silicon oxide based glass and a high-purity aluminium oxide. The ozonizer is capable of producing ozone that is not contaminated with Cr compounds at all or which is insufficiently contaminated to cause any practical problem in the fabrication of highly integrated semiconductor devices.

    Method and apparatus for generating ozone and methods of its use
    16.
    发明公开
    Method and apparatus for generating ozone and methods of its use 失效
    对于臭氧的生成和使用该装置的方法的方法和装置

    公开(公告)号：EP0703187A2

    公开(公告)日：1996-03-27

    申请号：EP95113254.7

    申请日：1995-08-23

    申请人： EBARA CORPORATION ,  KABUSHIKI KAISHA TOSHIBA

    发明人： Harada, Minoru ,  Shinjo, Ryoichi ,  Tsujimura, Manabu ,  Nakata, Rempei ,  Miyazaki, Kunihiro ,  Kaji, Naruhiko ,  Nakano, Yutaka

    IPC分类号： C01B13/11 ,  C01B13/10

    CPC分类号： C23C16/448 ,  C01B13/10 ,  C01B13/11 ,  C01B2201/60 ,  C23C8/12 ,  C23C16/402 ,  C23C16/4402

    摘要： Ozonizer (10) which supplies a feed gas to ozone generating cell (11) under application of a high voltage and which delivers an ozone gas through an ozone gas transport path (consisting of pipes (14) and (15)) as it has been generated in said ozone generating cell (11) is characterized in that the ozone gas transport path is furnished with means for removing at least one of NOx, HF and SOx (in the drawings, the means is for removing NOx) and that the ozone gas from the ozone generating cell (11) is passed through said removing means, whereby at least one of NOx, HF and SOx in said ozone gas is removed before it is delivered to a subsequent stage. The product ozone is not contaminated with Cr compounds at all or insufficiently contaminated to cause any practical problems in the fabrication of highly integrated semiconductor devices.
    Alternatively, ozonizer (10) which comprises an ozone generating cell (11) having an inlet (8) for supplying a feed gas, high voltage applying means (35) and an outlet (29) for discharging the ozone generated, and ozone delivery paths (30) and (31) for delivering the generated ozone is characterized in that oxygen (1) supplemented with 10 - 20 vol% of carbon dioxide and/or carbon monoxide (2) is used as the feed gas. The thus produced ozone is significantly low in the level of Cr compounds and, hence, can suitably be used in the formation of metal oxides, in particular, silicon oxide.

    Ozonizer
    17.
    发明公开
    Ozonizer 失效
    臭氧发生器

    公开(公告)号：EP0698576A2

    公开(公告)日：1996-02-28

    申请号：EP95113336.2

    申请日：1995-08-24

    申请人： EBARA CORPORATION ,  KABUSHIKI KAISHA TOSHIBA

    发明人： Harada, Minoru ,  Shinjo, Ryoichi ,  Tsujimura, Manabu ,  Nakata, Rempei ,  Miyazaki, Kunihiro ,  Kaji, Naruhiko

    IPC分类号： C01B13/11

    CPC分类号： C01B13/11

    摘要： In an improved ozonizer, at least those parts of an ozone gas delivery path located downstream of an ozone generating cell which are to come into contact with ozone gas are either composed of or coated with at least one ozone-resistant, Cr-free material selected from among aluminum (Al), an aluminum alloy, Teflon, fluorinated nickel, a nickel alloy, a silicon oxide based glass and a high-purity aluminium oxide. The ozonizer is capable of producing ozone that is not contaminated with Cr compounds at all or which is insufficiently contaminated to cause any practical problem in the fabrication of highly integrated semiconductor devices.

    摘要翻译： 在改进的臭氧发生器中，至少臭氧气体输送路径的位于臭氧发生池下游的要与臭氧气体接触的那些部分或者由至少一种选择的耐臭氧无Cr材料 从铝（Al），铝合金，特氟隆，氟化镍，镍合金，氧化硅系玻璃和高纯度氧化铝中选择。 臭氧发生器能够产生根本不被铬化合物污染的臭氧，或者其在制造高度集成的半导体器件时没有被充分污染而导致任何实际问题。