公开(公告)号：EP2620982A2

公开(公告)日：2013-07-31

申请号：EP13150824.4

申请日：2013-01-10

申请人： Samsung Electronics Co., Ltd

发明人： Lee, Chang-seung ,  Lee, Joo-ho ,  Kim, Yong-sung ,  Moon, Chang-youl

IPC分类号： H01L29/778 ,  H01L29/16 ,  H01L29/417 ,  H01L21/683

CPC分类号： H01L29/778 ,  H01L21/6835 ,  H01L29/1606 ,  H01L29/41775 ,  H01L2221/68327 ,  H01L2221/6835 ,  H01L2221/68368 ,  Y10S977/734

摘要： A method of manufacturing a graphene device may include forming a device portion including a graphene layer (GP1) on the first substrate (SUB1); attaching a second substrate (SUB2) on the device portion of the first substrate; and removing the first substrate. The removing of the first substrate may include etching a sacrificial layer between the first substrate and the graphene layer. After removing the first substrate, a third substrate may be attached on the device portion. After attaching the third substrate, the second substrate may be removed.

摘要翻译： 制造石墨烯器件的方法可以包括在第一衬底（SUB1）上形成包括石墨烯层（GP1）的器件部分; 将第二基板（SUB2）附接在所述第一基板的所述装置部分上; 并移除第一衬底。 去除第一衬底可以包括在第一衬底和石墨烯层之间蚀刻牺牲层。 在移除第一衬底之后，可以在器件部分上附接第三衬底。 在附接第三基板之后，可以移除第二基板。

公开(公告)号：EP1901426A1

公开(公告)日：2008-03-19

申请号：EP07115638.4

申请日：2007-09-04

申请人： Samsung Electronics Co., Ltd.

发明人： Lee, Joo-ho ,  Park, Hae-seok 521-704, Samsung Raemian Apartment 5th ,  Gu, Myeong-kwon ,  Shin, Jea-shik 154-201, Hwanggol-maeul 1danji Apartment ,  Song, In-sang 1616, Haetae Boramae Jusang Town ,  Shin, Kwang-jae 104-904, Injung Firenze Apartment

IPC分类号： H03H9/13 ,  H03H3/02 ,  H03H9/17 ,  H03H9/58

CPC分类号： H03H9/173 ,  H03H3/02 ,  H03H9/131 ,  H03H9/564 ,  H03H2003/021 ,  H03H2003/0471

摘要： A resonator (100) includes a substrate (110), and a resonating unit (135) formed on the substrate, and having a lower electrode (140), a piezoelectric film (150), and an upper electrode (160). The lower electrode is formed of at least two layers (141,142) to adjust a piezoelectric coupling coefficient. The lower electrode includes a first electrode layer and a second electrode layer, which have crystallographic characteristics, particularly, grain sizes or surface roughnesses Ra, different from each other, respectively. The first and the second electrode layers are formed to have a predetermined thickness ratio to each other.

摘要翻译： 谐振器（100）包括基板（110）和形成在基板上的并具有下电极（140），压电膜（150）和上电极（160）的谐振单元（135）。 下电极由至少两层（141,142）形成，以调节压电耦合系数。 下电极包括分别具有彼此不同的晶体学特性，特别是晶粒尺寸或表面粗糙度Ra的第一电极层和第二电极层。 第一电极层和第二电极层形成为具有彼此预定的厚度比。