PUMP, PUMP DEVICE, AND METHOD OF DISASSEMBLING PUMP DEVICE

    公开(公告)号:EP3699435A1

    公开(公告)日:2020-08-26

    申请号:EP18868678.6

    申请日:2018-10-19

    申请人: Ebara Corporation

    摘要: Provided is a pump that facilitates separation from a motor while curbing degradation of pump performance.
    A pump is provided. The pump includes: an impeller; a pump main shaft to which the impeller is attached; and a pump main shaft hub that is detachably attached to an end of the pump main shaft, and the pump main shaft hub is a tubular member, into which a motor main shaft is able to be inserted, which is configured to be coupled to the motor main shaft via transition fitting.

    CONTROL DEVICE, CONTROL SYSTEM, CONTROL METHOD, PROGRAM AND MACHINE LEARNING DEVICE

    公开(公告)号:EP3578825A3

    公开(公告)日:2020-05-06

    申请号:EP19172750.2

    申请日:2019-05-06

    申请人: Ebara Corporation

    IPC分类号: F04C25/02 F04C28/28 F04C28/06

    摘要: A control device (4) that controls a target vacuum pump (3) including a motor (31), including: a decision unit (452) that decides, using at least one of target state quantities at a time of a past stop process of the target vacuum pump or another vacuum pump wherein the target state quantities are state quantities which fluctuate in accordance with a load at a time of a process of stopping a vacuum pump, a normal fluctuation range or a normal time fluctuation behavior of the target state quantity at the time of the stop process; and a control unit (451) that controls the motor, wherein the control unit compares the target state quantity at the time of the process of stopping the target vacuum pump with the normal fluctuation range or the normal time fluctuation behavior, and changes a method of controlling the motor during the stop process depending on the comparison result.