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15 条记录 (耗时 0.009 秒)

    MACHINING METHOD AND MACHINE TOOL
    12.
    发明公开
    MACHINING METHOD AND MACHINE TOOL 有权
    BEARBEITUNGSVERFAHREN UND WERKZEUGMASCHINE

    公开(公告)号：EP2253421A1

    公开(公告)日：2010-11-24

    申请号：EP08721656.0

    申请日：2008-03-04

    申请人： MAKINO MILLING MACHINE CO. LTD.

    发明人： TAKAHASHI, Ikuma

    IPC分类号： B23Q5/58

    CPC分类号： B23Q11/04 ,  B23Q15/007 ,  G05B19/4062 ,  G05B2219/37342 ,  G05B2219/37632 ,  G05B2219/42288 ,  G05B2219/49155 ,  G05B2219/50155 ,  G05B2219/50205 ,  Y10T409/303752 ,  Y10T409/303808 ,  Y10T409/30392 ,  Y10T409/306832 ,  Y10T409/307224 ,  Y10T409/307672 ,  Y10T409/308512

    摘要： A minimum five-axis machine tool (11) has first to third linear feed axes orthogonal to each other as well as first and second rotational feed axes orthogonal to each other, wherein a rotational axis line of the first rotational feed axis C is parallel to the first linear feed axis Z. While a tool T and a work W are moved relatively through the second and third linear feed axes X, Y to perform machining of the work W by means of the tool T, the machine tool controls the first rotational feed axis C such that a rotational axis line of the second rotational feed axis A is perpendicular to the direction of relative movement of the perpendicular to the direction of relative movement of the tool T to the work W, and controls a power supplied to a motor for the second rotational feed axis A when a torque around the second rotational feed axis A exceeds a specified threshold.

    摘要翻译： 最小五轴机床（11）具有彼此正交的第一至第三线性进给轴以及彼此正交的第一和第二旋转进给轴，其中第一旋转进给轴C的旋转轴线平行于 第一直线进给轴Z.当工具T和工件W相对通过第二和第三直线进给轴线X，Y移动以通过工具T对工件W进行加工时，机床控制第一旋转 进给轴线C，使得第二旋转进给轴线A的旋转轴线垂直于垂直于工具T相对于工件W的相对运动方向的相对运动的方向，并且控制提供给电动机的功率 对于第二旋转进给轴线A，当第二旋转进给轴线A周围的扭矩超过规定的阈值时。

    Polishing apparatus having interlock function
    14.
    发明公开
    Polishing apparatus having interlock function 失效
    Poliervorrichtung mit Verriegelungsfunktion

    公开(公告)号：EP0810064A3

    公开(公告)日：1998-12-23

    申请号：EP97108597

    申请日：1997-05-28

    申请人： EBARA CORP

    发明人： WATANABE KATSUHIDE

    IPC分类号： B24B37/04 ,  B24B49/16 ,  G05B19/4063 ,  G05B19/416 ,  B24B1/00

    CPC分类号： B24B37/005 ,  B24B49/16 ,  G05B19/4063 ,  G05B19/416 ,  G05B2219/37434 ,  G05B2219/45199 ,  G05B2219/50113 ,  G05B2219/50205 ,  G05B2219/50276

    摘要： A polishing apparatus is used for polishing a workpiece such as a semiconductor wafer to a flat mirror finish. The polishing apparatus having interlock function comprises a turntable having a polishing surface thereon, a top ring for holding a workpiece to be polished and pressing the workpiece against the polishing surface on the turntable, a first motor for rotating the turntable, and a second motor for rotating the top ring. The polishing apparatus further comprises a first actuator for lifting and lowering the top ring, a second actuator for moving the top ring in a horizontal direction, and a control unit for controlling the motors and the actuators. The control unit controls the motors and the actuators in such a manner that when an abnormality is detected in at least one of the motors and the actuators, at least one of the motors and the actuators other than that of abnormality performs a predetermined operation.

    摘要翻译： 抛光装置用于将半导体晶片等工件研磨成平面镜面。 具有互锁功能的抛光装置包括：具有抛光面的转台，用于保持要抛光的工件的顶环，并将工件压靠在转台上的抛光表面上;旋转转台的第一电动机;以及用于 旋转顶环。 抛光装置还包括用于提升和降低顶环的第一致动器，用于沿水平方向移动顶环的第二致动器，以及用于控制电动机和致动器的控制单元。 控制单元以这样的方式控制电动机和致动器，即当在至少一个电动机和致动器中检测到异常时，除了异常之外的至少一个电动机和致动器执行预定的操作。

    TOOL BREAKAGE DETECTING SYSTEM
    15.
    发明公开
    TOOL BREAKAGE DETECTING SYSTEM 失效
    WERKZEUGBRUCHÜBERWACHUNGSSYSTEM

    公开(公告)号：EP0749804A1

    公开(公告)日：1996-12-27

    申请号：EP95934851.7

    申请日：1995-10-19

    申请人： FANUC LTD.

    发明人： NAGATOMI, Takashi Fanuc Mansion Harimomi 6-108 ,  SAKAGUCHI, Miwako Fanuc Dai-3 Villa-karamatusu

    IPC分类号： B23Q17/09

    CPC分类号： G05B19/4065 ,  B23Q17/0961 ,  G05B2219/37246 ,  G05B2219/37344 ,  G05B2219/50205

    摘要： A cutter fracture detecting system is capable of detecting a fracture of a cutter highly accurately which may occur even when no substantial loads are imposed on a rotating axis and a cutter feed axis of a machine tool. A rotating axis disturbant load torque estimating unit (1) and a moving axis disturbant load torque estimating unit (2) monitor disturbant load torques on a spindle and an axis with respect to which a workpiece and a cutter move relatively to each other, and still axis disturbant load torque estimating units (3, 4) also monitor disturbant load torques on axes with respect to which the workpiece and the cutter do not move relatively to each other. A comparing unit (5) determines that the cutter is fractured based on the disturbant load torques estimated by the disturbant load torque estimating units. When a cutter fracture is detected, the machine tool is stopped by a machine shutdown command unit (6).

    摘要翻译： 刀具断裂检测系统能够高精度地检测刀具断裂，即使在机床的旋转轴线和切削刀进给轴线上没有实质的负载的情况下也可能发生切割。 旋转轴干扰负载转矩估计单元（1）和移动轴干扰负载转矩估计单元（2）监测主轴上的干扰负载转矩和相对于工件和切割器相对移动的轴线，并且静止 轴扰动负载转矩估计单元（3,4）还监测相对于工件和切割器彼此不相对移动的轴上的扰动负载转矩。 比较单元（5）基于由扰动负载转矩估计单元估计的扰动负载转矩来确定切割器断裂。 当检测到刀具断裂时，机床由机器停机命令单元（6）停止。