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公开(公告)号：EP0622621A3
公开(公告)日：1995-03-29
申请号：EP94301848.1
申请日：1994-03-15
摘要： A cold cathode ionization gauge includes a first electrode (12) and a second electrode (20) which are spaced apart and insulated from one another and have a common axis. A magnetic field generator surrounds the gauge and applies a magnetic field along the common axis of the electrodes. The magnetic field generator includes at least one pair of opposed axially magnetized magnets (32, 34) adjacent to each other. The magnet arrangement minimizes magnetic flux outside the gauge while increasing the strength of the magnetic flux inside the gauge. The magnetic arrangement also allows the gauge to be ignited in a very high vacuum, thereby extending the operating range of the gauge.
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公开(公告)号：EP0271769A1
公开(公告)日：1988-06-22
申请号：EP87117802.6
申请日：1987-12-02
发明人： Limp, Hans
摘要： Die Erfindung bezieht sich auf ein Penning-Ionisationsvakuummeter mit einem Elektrodensystem (Meßsystem), das eine Anode (10) und eine Kathode (7) umfaßt, welche im Magnetfeld eines Permanentmagneten (3, 4) angeordnet sind, und das mit einer Zündhilfe ausgerüstet ist. Als Zündhilfe ist in dem Magnetfeld des Permanentmagneten (2) ein weiteres mit einer Anode (16) und mindestens einer Kathode (19) ausgerüstetes Penning-System (Zündsystem 15) angeordnet, dessen Abmessungen wesentlich kleiner sind als die Abmessungen des Penning-Meßsystems.
摘要翻译： 本发明涉及一种具有电极系统（测量系统），其包括阳极（10）和阴极（7），其在永久磁铁的磁场（3，4）被布置在潘宁离子计，并且其配备有辅助启动 ， 由于在永久磁铁（2）还具有阳极（16）和至少一个阴极（19）设置，其尺寸比潘宁测量系统的尺寸显着更小的磁场的点火辅助配潘宁系统（点火系统15）。
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公开(公告)号：EP3353802A1
公开(公告)日：2018-08-01
申请号：EP15774543.1
申请日：2015-09-23
申请人： Inficon AG
发明人： WÜEST, Martin
IPC分类号： H01J41/06
CPC分类号： H01J41/06 , G01L21/34 , H01J2237/18 , H01J2237/31701
摘要： The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.
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公开(公告)号：EP2753907A1
公开(公告)日：2014-07-16
申请号：EP12748149.7
申请日：2012-08-02
申请人： Inficon GmbH
发明人： ANDREAUS, Bernhard
摘要： The invention relates to an ionization vacuum measuring cell comprising: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between said two electrodes, said measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring means (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and comprises a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1). The yoke (2) extends axially away from the permanent magnet ring (1) on both sides and radially towards the axis (7) and the first electrode (3) on both sides after a specified distance (d) from the permanent magnet ring (1) such that the yoke (2) forms two annular poles (9a, b) on both sides at a distance from the permanent magnet ring (1), via which at least some of the field lines of the permanent magnet ring (1) form a closed loop within the measuring chamber (20), penetrating the first electrode (3).
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公开(公告)号：EP2215647B1
公开(公告)日：2012-06-20
申请号：EP08806729.3
申请日：2008-10-07
申请人： Edwards Limited
发明人： KEY, Matthew
IPC分类号： H01J41/06
CPC分类号： H01J41/06
摘要： A gauge head (10) for an ionisation vacuum gauge includes an electrical device (12, 28, 54) operable to provide an electrical discharge in a gas whose pressure is to be measured to initiate ion discharge in the gas.
摘要翻译： 一种用于电离真空计的测头（10）包括电气装置（12,28,54），其可操作以提供气体中的放电，该气体的压力将被测量以引发气体中的离子放电。
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公开(公告)号：EP1012870B1
公开(公告)日：2008-05-07
申请号：EP98913603.1
申请日：1998-02-27
申请人： Inficon GmbH
摘要： The invention relates to a Penning vacuum meter (1), comprising a cathode and an anode. According to the invention, the cathode (11) consists at least mainly of titanium in order to avoid the detrimental effects of the cathode disintegrating.
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公开(公告)号：EP1856713A2
公开(公告)日：2007-11-21
申请号：EP06708602.5
申请日：2006-03-02
申请人： Inficon GmbH
发明人： WETZIG, Daniel , GERDAU, Ludolf
IPC分类号： H01J41/06
摘要： A cold cathode pressure sensor (10) comprises a gas-tight housing (12), a test gas inlet (18), an anode (14) and a cathode (16, 17) arranged in the housing (12), and a radiation source (20) directed towards the cathode (16, 17) in order to ignite a cold cathode discharge. The housing (12) is at least in part made of glass. The radiation source (20) is arranged outside the housing (12) and irradiates the cathode (16, 17) through the glass which makes up the housing. The wavelength of the radiation from the radiation source (20) ranges substantially from more than 350 nm to less than 1400 nm.
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19.发明公开KALTKATODEN - IONISATIONSMANOMETER MIT HOHER STANDZEIT DURCH ZWEI GETRENNTE KATODEN 有权KALTKATODEN - IONISATIONSMANOMETER MIT HOHER STANDZEIT DURCH ZWEI GETRENNTE KATODEN
公开(公告)号：EP1540294A1
公开(公告)日：2005-06-15
申请号：EP03753312.2
申请日：2003-09-17
摘要： The invention relates to a cold-cathode ionisation manometer for measuring pressure in a vacuum, said manometer operating according to the inverse magnetron principle and being used to measure pressures in fine vacuums, high vacuums, and ultrahigh vacuums (preferably between 10 Pa and 1 Pa). The aim of the invention is to reduce the contamination tendency and thus to extend the service life of said measuring tubes. To this end, a measuring tube comprising two separately controlled cathodes (K1, K2) and a common anode (A), enabling two independent discharges to be ignited inside the same, is used. While a discharge (K1) which is directly localised at the inlet of the measuring tube takes on the function of a gas purification device in which plasma-chemical dissociation reactions enable vapours contaminated by hydrocarbons or other substances entering into the measuring tube to be cracked or polymerised, a second discharge chamber (K2) inserted into the measuring tube housing (MRG) and protected by a gas discharge path (K1) operates as an intrinsic measuring chamber. Only the discharge current flowing out of said discharge area (K2) is evaluated and is used to measure the pressure. Said special double-chamber measuring tube geometry enables the plasma to burn in the integral measuring chamber (K2) under optimum conditions of cleanliness, thus enabling the service life of the measuring tube to be extended.
摘要翻译： 本发明涉及一种用于测量真空中的压力的冷阴极电离压力计，所述压力计根据反磁控原理工作，并用于测量精细真空，高真空和超高真空（优选10Pa至1Pa ）。 本发明的目的是减少污染趋势并由此延长所述测量管的使用寿命。 为此，使用包括两个单独控制的阴极（K1，K2）和公共阳极（A）的测量管，使得两个独立的放电在其内被点燃。 当直接位于测量管入口处的排出口（K1）具有气体净化装置的功能时，其中等离子体 - 化学分解反应使得被碳氢化合物或其他物质污染的蒸汽进入测量管而被破碎或 聚合后，插入测量管壳体（MRG）中并由气体排出路径（K1）保护的第二排出室（K2）用作本征测量室。 只有流出所述放电区域（K2）的放电电流被评估并用于测量压力。 所述特殊的双室测量管几何形状使等离子体能够在最佳清洁条件下在整体式测量室（K2）中燃烧，从而延长了测量管的使用寿命。
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公开(公告)号：EP1012870A1
公开(公告)日：2000-06-28
申请号：EP98913603.1
申请日：1998-02-27
申请人： Leybold Vakuum GmbH
摘要： The invention relates to a Penning vacuum meter (1), comprising a cathode and an anode. According to the invention, the cathode (11) consists at least mainly of titanium in order to avoid the detrimental effects of the cathode disintegrating.
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