公开(公告)号：EP1540294B1

公开(公告)日：2005-12-28

申请号：EP03753312.2

申请日：2003-09-17

申请人： Otto-Von-Guericke-Universität Magdeburg

发明人： EDELMANN, Christian ,  WILFERT, Stefan

IPC分类号： G01L21/34 ,  H01J41/06

CPC分类号： H01J41/06 ,  G01L21/34

摘要： The invention relates to a cold-cathode ionisation manometer for measuring pressure in a vacuum, said manometer operating according to the inverse magnetron principle and being used to measure pressures in fine vacuums, high vacuums, and ultrahigh vacuums (preferably between 10 Pa and 1 Pa). The aim of the invention is to reduce the contamination tendency and thus to extend the service life of said measuring tubes. To this end, a measuring tube comprising two separately controlled cathodes (K1, K2) and a common anode (A), enabling two independent discharges to be ignited inside the same, is used. While a discharge (K1) which is directly localised at the inlet of the measuring tube takes on the function of a gas purification device in which plasma-chemical dissociation reactions enable vapours contaminated by hydrocarbons or other substances entering into the measuring tube to be cracked or polymerised, a second discharge chamber (K2) inserted into the measuring tube housing (MRG) and protected by a gas discharge path (K1) operates as an intrinsic measuring chamber. Only the discharge current flowing out of said discharge area (K2) is evaluated and is used to measure the pressure. Said special double-chamber measuring tube geometry enables the plasma to burn in the integral measuring chamber (K2) under optimum conditions of cleanliness, thus enabling the service life of the measuring tube to be extended.

公开(公告)号：EP1540294A1

公开(公告)日：2005-06-15

申请号：EP03753312.2

申请日：2003-09-17

申请人： Otto-Von-Guericke-Universität Magdeburg

发明人： EDELMANN, Christian ,  WILFERT, Stefan

IPC分类号： G01L21/34 ,  H01J41/06

CPC分类号： H01J41/06 ,  G01L21/34

摘要： The invention relates to a cold-cathode ionisation manometer for measuring pressure in a vacuum, said manometer operating according to the inverse magnetron principle and being used to measure pressures in fine vacuums, high vacuums, and ultrahigh vacuums (preferably between 10 Pa and 1 Pa). The aim of the invention is to reduce the contamination tendency and thus to extend the service life of said measuring tubes. To this end, a measuring tube comprising two separately controlled cathodes (K1, K2) and a common anode (A), enabling two independent discharges to be ignited inside the same, is used. While a discharge (K1) which is directly localised at the inlet of the measuring tube takes on the function of a gas purification device in which plasma-chemical dissociation reactions enable vapours contaminated by hydrocarbons or other substances entering into the measuring tube to be cracked or polymerised, a second discharge chamber (K2) inserted into the measuring tube housing (MRG) and protected by a gas discharge path (K1) operates as an intrinsic measuring chamber. Only the discharge current flowing out of said discharge area (K2) is evaluated and is used to measure the pressure. Said special double-chamber measuring tube geometry enables the plasma to burn in the integral measuring chamber (K2) under optimum conditions of cleanliness, thus enabling the service life of the measuring tube to be extended.

摘要翻译： 本发明涉及一种用于测量真空中的压力的​​冷阴极电离压力计，所述压力计根据反磁控原理工作，并用于测量精细真空，高真空和超高真空（优选10Pa至1Pa ）。 本发明的目的是减少污染趋势并由此延长所述测量管的使用寿命。 为此，使用包括两个单独控制的阴极（K1，K2）和公共阳极（A）的测量管，使得两个独立的放电在其内被点燃。 当直接位于测量管入口处的排出口（K1）具有气体净化装置的功能时，其中等离子体 - 化学分解反应使得被碳氢化合物或其他物质污染的蒸汽进入测量管而被破碎或 聚合后，插入测量管壳体（MRG）中并由气体排出路径（K1）保护的第二排出室（K2）用作本征测量室。 只有流出所述放电区域（K2）的放电电流被评估并用于测量压力。 所述特殊的双室测量管几何形状使等离子体能够在最佳清洁条件下在整体式测量室（K2）中燃烧，从而延长了测量管的使用寿命。